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Atomic Spectroscopy
For the past 40 years, we have provided products to the Atomic Spectroscopy industry that solve laboratory problems and improve the success of our OEM partners. These products include unique sample delivery solutions, sample preparation tools, autosamplers, and solutions to improve sample throughput and detection limitations, among others. In short, we strive to understand the markets our OEM partners serve in order to deliver products that meet their needs.
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Electronics & Power
Excelitas Technologies offers a wide range of high-performance electronics, power and energetics technologies to drive your most demanding photonic systems. Our Electronics & Power offering includes Capacitor Chargers, Spark Gaps and Transformers, High-Voltage DC Power Supplies and Atomic Frequency Standards. Our Energetics portfolio includes Electronic Safe & Arm devices, Detonators, Ignition Safety devices, and Rocket Motor Initiators.
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Atomic Force Microscope
XE7
Park XE7 has all the state-of-the-art technology you've come to expect from Park Systems, at a price your lab can afford. Designed with the same attention to detail as our more advanced models, the XE7 allows you to do your research on time and within budget.
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Transmission Electron Microscope
TEM
Atomic Resolution Electron Microscope offering a maximum accelerating voltage of 300 kV, and equipped with JEOL’s own Cs Correctors. This instrument guarantees an unprecedented STEM-HAADF image resolution of 63 pm.
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Atomic Force Microscope
LensAFM
The Nanosurf LensAFM is an atomic force microscope that continues where optical microscopes and profilometers reach their resolution limits. It is mounted like a normal objective lens, thus extending the resolution and measuring capabilities of these instruments.
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Atomic Force Microscope
FlexAFM
For success in research, scientists depend on professional tools that can readily provide the information needed, regardless of the tasks at hand.
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Atomic Oven
Atomic oven with collimated output for ultra-high vacuum systems, loaded with Sr, Yb or Ca. The oven provides superior heat isolation while achieving high atomic flux. Its low power consumption results in exceptionally low pressures during normal operation for temperatures up to 650 °C. The chamber is shipped in an ultra-high vacuum storage chamber supplied by AOSense. Customers can provide AOSense with a previously purchased storage chamber for repeat orders. Please contact us for more information.
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ALD Advantages
Atomic Layer Deposition (ALD) stands out for one reason: control. The most significant advantages of thin film deposition via Atomic Later Deposition over other methods, are manifest in four distinct areas – film conformality, low temperature processing, stoichiometric control, and inherent film quality associated with the self-limiting, and self-assembled nature of the ALD mechanism ALD is exceptionally effective at coating surfaces that exhibit ultra high aspect ratio topographies, as well as surfaces requiring multilayer films with good quality interfaces technology. This thin-film process builds materials one atomic layer at a time, delivering unmatched uniformity and sub-nanometer precision, even on complex 3D structures. That level of accuracy makes ALD a critical technology for advanced semiconductor manufacturing, flexible electronics, and materials research.
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Atomic Force Microscope
3DM Serirs
Park Systems has introduced the revolutionary Park 3DM Series, the completely automated AFM system designed for overhang profiles, high-resolution sidewall imaging, and critical angle measurements. With the patented decoupled XY and Z scanning system with tilted Z-scanner, it overcomes the challenges of the normal and flare tip methods in accurate sidewall analysis. In utilizing our True Non-Contact Mode™, the Park 3DM Series enables non-destructive measurement of soft photoresist surfaces with high aspect ratio tips.
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Analytical Services
Atomic Force Microscopy (AFM) allows for sub nanometer resolution imaging of surface topography and is able to quantify surface roughness at the angstrom scale. Our team can give you highly accurate measurements such as surface topography, dopant distribution, magnetic domain features, and a wide variety of other sample properties to give you the information you need to do great work.Park can provide measurements in the following areas:● Topography (surface roughness, grain size, step height, etc.)● Mechanical Properties (stiffness, etc.)● Electrical properties (capacitance, conductivity, etc.)● Thermal properties ● Magnetic properties These properties can be measured in air or liquid, depending on your needs.
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ATOM Handler
The ATOM-IC Handler is a benchtop handler designed for use on engineering test floors and in development operations. Its innovative design allows for maximum flexibility and minimum cost and maintenance.
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Ozone Generators & Systems
MKS offers a wide range of ozone generators and modular delivery systems which produce ultra-pure, reliable ozone gas. In the clean semiconductor environment, Ozone reacts with a wide range of precursor gases resulting in the creation of Al2O3, ZrO2, HfO2, and La2O3 metal oxides to enable thin film deposition processes like Atomic Layer Deposition (ALD) and Etch (ALE). MKS’ generator uses Grade 6 gas, enabling the creation of higher film density improving product yield. Photovoltaic and Display manufacturing leverage semiconductor best practices and utilize ozone to create enhanced thin film barriers, improving product performance and reliability.
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Atomic Absorption Spectrophotometer
Atomic Absorption Spectrophotometer (AAS) is a kind of instrument for the inorganic analysis. It is widely used in environmental protection, medicine, sanitation, metallurgy, geology and petrochemical industry fields for micro and trace analysis. Atomic Absorption Spectrophotometer can analyze more than seventy kinds of elements. With the development of instrument accessories and analyzing technology, more objects, from element to morphology and from nonmetallic anion to gas-phase molecule, could be analyzed directly or indirectly.
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Nuclear Safeguard Systems
Nuclear Safeguards are measures to verify that States comply with their international obligations not to use nuclear materials (plutonium, uranium and thorium) for nuclear explosives purposes. Global recognition of the need for such verification is reflected in the requirements of the Treaty on the Non-Proliferation of Nuclear Weapons (NPT) for the application of safeguards by the International Atomic Energy Agency (IAEA). Also, the Treaty Establishing the European Atomic Energy Community (the Euratom Treaty) includes requirements for the application of safeguards by the European Commission. Organizations such as the IAEA and EURATOM and others are tasked with ensuring declared amounts of material are indeed present in the facilities in which they are stored and that such material is not being diverted to other uses.
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NanoLattice Pitch Standard for Mask Handling Tools (NLSM)
The NanoLattice™ (NLSM) 100 nm pitch standard utilizes gratings with near perfect periodicity to calibrate magnification and scan linearity of CD-SEM and Atomic Force Microscopes (AFM). Make the grade, with the only pitch standard of its kind available below the 130 nm node.
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GPS Clocks
The Excelitas Rubidium Atomic Frequency Standard ( RAFS) is an exceptionally high-performance and high-reliability space-qualified rubidium clock developed for global navigation satellite systems.
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Nanolattice Standards for Analytical Instruments
The NanoLattice™ (NLSM) 100 nm pitch standard utilizes gratings with near perfect periodicity to calibrate magnification and scan linearity of Electron and Atomic Force Microscopes (AFM). Make the grade, with the highest quality pitch standard of its kind available.
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Rubidium Atomic Audio Clock
PERF10
Stanford Research Systems, Inc.
Perfection is a high standard - but your studio clocks deserve nothing less. That''s why we designed the PERF10, to offer audio professionals and demanding audiophiles a frequency reference of staggering accuracy and unmatched stability.
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Atomic Absorption Spectrometry
Is an easy, high-throughput, and inexpensive technology used primarily to analyze elements in solution.
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Low Temperature Gas Source
Get a low-cost means to introduce a gas without thermal pre-cracking using Veeco’s low-temperature gas source for molecular beam epitaxy (MBE) systems. The source features a large conductance tube for fast gas switching and a diffuser end plate for good growth uniformity. It is an ideal gas injector for CBr4 for carbon doping in GaAs and NH3 for GaN growth, as well as any other gases that do not require thermal pre-cracking. Enhance system capabilities further by combining the source on one mounting flange with an Atomic Hydrogen Source or 5cc Dopant Source.
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Ozone Gas Generators
SEMOZON® Ozone gas generators and subsystems are the industry standard for compact, high concentration, ultra-clean ozone gas generation. Applications include Atomic Layer Deposition (ALD), Atomic Layer Etch (ALE), Chemical Vapor Deposition (CVD) and Wet Cleaning.
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Surface Analysis
Dimension FastScan Bio
The Dimension FastScan Bio Atomic Force Microscope (AFM) breaks longstanding barriers to provide routine high-resolution research of biological dynamics, with temporal resolution up to 3 frames per second for live sample observations. Furthermore, it does this while making the AFM easier to use than ever before.
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Atomic Force Microscope
AFM
Atomic Force Microscopes are the most widely used SPM microscopes. They can be applied in fields that span from surface science, semiconductor technology, magnetic media, polymer science, optics to biology, chemistry and medicine.Absolute positioning with an accuracy of 2 nm.
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Atomic Absorption Spectrometer
Atomic absorption spectroscopy (AAS) determines the presence of metals in liquid samples. Metals include Fe, Cu, Al, Pb, Ca, Zn, Cd and many more. It also measures the concentrations of metals in the samples. Typical concentrations range in the low mg/L range.
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kSA ACE
The kSA Atomic Control for Epitaxy (ACE) metrology tool is a highly sensitive instrument that measures the in situ flux rate of atomic species using the principle of atomic absorption spectroscopy.
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Ozone Gas Delivery Systems
MKS ozone gas delivery systems provide field-proven, high concentration, ultra-clean ozone generation for advanced thin film applications such as Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), Tetraethyl Orthosilicate (TEOS)/Ozone CVD (HDSACVD), contaminant removal and oxide growth. Gas delivery models have integrated ozone concentration monitoring, flow control, and power distribution. Additional system options include safety monitoring, status indicators and ozone destruction capability.
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Cold Atomic Beam System
Detailed description of item: Complete cold atomic beam sources for alkaline-earth precision experiments and atomic devices. Small chambers with patented permanent-magnet Zeeman slowers and in-vacuum 2D MOT optics allow high flux with low outgassing and no thermal beam flux at the cold atom port, which provides a CF-133 connection to customer vacuum chamber. Advanced thermal design of the effusion oven allows long-lifetime operation at minimal heating power, with no water cooling. An integrated low-outgassing hot window is provided for coupling of on-axis Zeeman cooling light. Ion and getter pumps integrated into the chamber manage outgassing from the oven at temperatures up to 520 °C. Operating baseline pressures below 1×10-11 mbar can be attained in the customer’s downstream cold atom (typically 3D MOT) science chamber, with suitable pumping speed provided at the differentially-pumped cold beam output port.
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NanoLattice Pitch Standard (NLSM)
The NanoLattice™ (NLSM) 100 nm pitch standard utilizes gratings with near perfect periodicity to calibrate magnification and scan linearity of CD-SEM and Atomic Force Microscopes (AFM). Make the grade, with the only pitch standard of its kind available below the 130 nm node.
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Level AFM
Is a flexible Atomic Force Microscope for scientists. It offers a wide range of modes, sophisticated spectroscopy options and the programming of user defined experiments. Besides standard options found in Anfatec's other AFMs, the level AFM allows to add Anfatec's full range of AFM options, such as KPFM, closed loop operation, automated sample motion, acoustic enclosure, humidity and temperature control ... Each instrument is adapted to the user's specific needs.





























