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On-Wafer Measurements
Accurate DC/CV (and RF) statistical modeling of semiconductor devices requires collecting a significant amount of measured data from different wafers across several temperatures. Keysight Technologies recommends IC-CAP WaferPro as a turn-key DC/CV and RF automated characterization solution to help modeling and device engineers achieve more efficient on-wafer measurements across temperature. This new breakthrough solution is based on IC-CAP modeling software and efficiently controls DC/CV analyzers, network analyzers, probers, switching matrixes, and temperature chucks, as well as the powerful 407x and 408x Series of Keysight parametric testers.
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High Temperature Chucks
High temperature electrostatic chucks are available for the ranges -60 to +400 deg. C, and for 350 to 600 deg. C. Different materials and constructions are used in these two ranges.
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NI-9217, 4-Channel, 400 S/s Aggregate, 0 Ω to 400 Ω, PT100 RTD C Series Temperature Input Module
779592-01
4-Channel, 400 S/s Aggregate, 0 Ω to 400 Ω, PT100 RTD C Series Temperature Input Module - The NI‑9217 is a resistance temperature detector (RTD) input module. You can configure the NI‑9217 for two sample rate modes: high sample rate or high resolution. The NI‑9217 is compatible with 3‑ and 4‑wire RTD measurements, and it automatically detects the type of RTD (3‑ or 4‑wire) connected to the channel and configures each channel for the appropriate mode. The module provides per channel current excitation. The NI‑9217 features calibration and includes a channel‑to‑earth ground double isolation barrier for safety, noise immunity, and a high common-mode voltage range.
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NI-9216, 8-Channel, 400 S/s Aggregate, 0 Ω to 400 Ω, PT100 RTD C Series Temperature Input Module
785186-01
8-Channel, 400 S/s Aggregate, 0 Ω to 400 Ω, PT100 RTD C Series Temperature Input Module - The NI‑9216 is a resistance temperature detector (RTD) input module. You can configure the NI‑9216 for two sample rate modes: high sample rate or high resolution. The NI‑9216 is compatible with 3‑ and 4‑wire RTD measurements, and it automatically detects the type of RTD (3-‑or 4‑wire) connected to the channel and configures each channel for the appropriate mode. The module provides per channel current excitation. The NI‑9216 features calibration and includes a channel‑to‑earth ground double isolation barrier for safety, noise immunity, and a high common-mode voltage range.
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NI-9213, 16-Channel, 75 S/s Aggregate, ±78 mV C Series Temperature Input Module
785185-01
16-Channel, 75 S/s Aggregate, ±78 mV C Series Temperature Input Module - The NI‑9213 is a high-density thermocouple input module that is designed for higher channel count systems. With this module, you can add thermocouples to mixed-signal test systems without taking up too many slots. The NI‑9213 includes anti-aliasing filters, open-thermocouple detection, and cold-junction compensation for high-accuracy thermocouple measurements. The NI‑9213 features NIST‑traceable calibration and a channel‑to‑earth ground double isolation barrier for safety, noise immunity, and high common-mode voltage range.
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NI-9212, 8-Channel, 95 S/s/ch Simultaneous, ±78 mV C Series Temperature Input Module
785259-01
8-Channel, 95 S/s/ch Simultaneous, ±78 mV C Series Temperature Input Module - The NI‑9212 offers channel‑to‑channel, isolated thermocouple input channels. The NI‑9212 channel‑to‑channel isolation protects channels from continuous voltages up to 250 Vrms and transient (withstand) voltages up to 1500 Vrms. You can use the NI‑9212 in a variety of applications that are not conducive for bank-isolated channels such as white goods testing, in-vehicle data logging, battery stack testing, as well as in various other noisy industrial environments.
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NI-9226, 8-Channel, 400 S/s Aggregate, 0 Ω to 4000 Ω, PT1000 RTD C Series Temperature Input Module
783864-02
8-Channel, 400 S/s Aggregate, 0 Ω to 4000 Ω, PT1000 RTD C Series Temperature Input Module - The NI‑9226 is a resistance temperature detector (RTD) input module. You can configure the NI‑9226 for two sample rate modes: high sample rate or high resolution. The NI‑9226 is compatible with 3‑ and 4‑wire RTD measurements, and it automatically detects the type of RTD (3‑ or 4‑wire) connected to the channel and configures each channel for the appropriate mode. The module provides per-channel current excitation. The NI‑9226 features calibration and includes a channel‑to‑earth ground double isolation barrier for safety, noise immunity, and a high common-mode voltage range.
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NI-9210, 4-Channel, 14 S/s Aggregate, ±80 mV C Series Temperature Input Module
785043-01
4-Channel, 14 S/s Aggregate, ±80 mV C Series Temperature Input Module - The NI‑9210 includes anti-aliasing filters, open-thermocouple detection, and cold-junction compensation for high-accuracy thermocouple measurements. The NI‑9210 features NIST‑traceable calibration and a channel‑to‑earth ground double isolation barrier for safety, noise immunity, and high common-mode voltage range.
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NI-9226, 8-Channel, 400 S/s Aggregate, 0 Ω to 4000 Ω, PT1000 RTD C Series Temperature Input Module
783864-01
8-Channel, 400 S/s Aggregate, 0 Ω to 4000 Ω, PT1000 RTD C Series Temperature Input Module - The NI‑9226 is a resistance temperature detector (RTD) input module. You can configure the NI‑9226 for two sample rate modes: high sample rate or high resolution. The NI‑9226 is compatible with 3‑ and 4‑wire RTD measurements, and it automatically detects the type of RTD (3‑ or 4‑wire) connected to the channel and configures each channel for the appropriate mode. The module provides per-channel current excitation. The NI‑9226 features calibration and includes a channel‑to‑earth ground double isolation barrier for safety, noise immunity, and a high common-mode voltage range.
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NI-9213, 16-Channel, 75 S/s Aggregate, ±78 mV C Series Temperature Input Module
785185-02
16-Channel, 75 S/s Aggregate, ±78 mV C Series Temperature Input Module - The NI‑9213 is a high-density thermocouple input module that is designed for higher channel count systems. With this module, you can add thermocouples to mixed-signal test systems without taking up too many slots. The NI‑9213 includes anti-aliasing filters, open-thermocouple detection, and cold-junction compensation for high-accuracy thermocouple measurements. The NI‑9213 features NIST‑traceable calibration and a channel‑to‑earth ground double isolation barrier for safety, noise immunity, and high common-mode voltage range.
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NI-9216, 8-Channel, 400 S/s Aggregate, 0 Ω to 400 Ω, PT100 RTD C Series Temperature Input Module
783863-02
8-Channel, 400 S/s Aggregate, 0 Ω to 400 Ω, PT100 RTD C Series Temperature Input Module - The NI‑9216 is a resistance temperature detector (RTD) input module. You can configure the NI‑9216 for two sample rate modes: high sample rate or high resolution. The NI‑9216 is compatible with 3‑ and 4‑wire RTD measurements, and it automatically detects the type of RTD (3-‑or 4‑wire) connected to the channel and configures each channel for the appropriate mode. The module provides per channel current excitation. The NI‑9216 features calibration and includes a channel‑to‑earth ground double isolation barrier for safety, noise immunity, and a high common-mode voltage range.
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REM-11120, 4-Channel Thermocouple, 1-Channel Voltage, Temperature Input Module for Remote I/O
784750-01
4-Channel Thermocouple, 1-Channel Voltage, Temperature Input Module for Remote I/O - The REM‑11120 is a temperature input module for remote I/O. Remote I/O systems are low-cost, modular systems for simple machine control and measurements. A remote I/O system consists of an EtherCAT bus coupler and individual modules mounted on a DIN rail. You control the REM‑11120 from a real-time controller such as a CompactRIO Controller or an Industrial Controller. You can use remote I/O hardware to add low-cost I/O for simple tasks while your controller handles advanced tasks such as image processing, motion control, and high-speed or specialty measurements. The REM‑11120 also has an adjustable filter time for improved measurement quality and optional external cold junction compensation (CJC) or PT100 resistance temperature detector (RTD) measurements.
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sbRIO-9211, Non-Enclosed, 4-Channel, 14 S/s Aggregate, ±80 mV C Series Temperature Input Module
780877-01
Non-Enclosed, 4-Channel, 14 S/s Aggregate, ±80 mV C Series Temperature Input Module - The sbRIO‑9211 includes anti-aliasing filters, open-thermocouple detection, and cold-junction compensation for high-accuracy thermocouple measurements. The sbRIO‑9211 features NIST‑traceable calibration and a channel‑to‑earth ground double isolation barrier for safety, noise immunity, and high common-mode voltage range. Non-enclosed modules are designed for OEM applications.
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sbRIO-9213, Non-Enclosed, 16-Channel, 75 S/s Aggregate, ±78 mV C Series Temperature Input Module
781210-01
Non-Enclosed, 16-Channel, 75 S/s Aggregate, ±78 mV C Series Temperature Input Module - The sbRIO-9213 is a high-density thermocouple input module that is designed for higher-channel-count systems. With this module, you can add thermocouples to mixed-signal test systems without taking up too many slots. The sbRIO-9213 includes anti-aliasing filters, open-thermocouple detection, and cold-junction compensation for high-accuracy thermocouple measurements. The sbRIO-9213 features NIST-traceable calibration and a channel-to-earth ground double isolation barrier for safety, noise immunity, and high common-mode voltage range. Non-enclosed modules are designed for OEM applications.
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NI-9216, 8-Channel, 400 S/s Aggregate, 0 Ω to 400 Ω, PT100 RTD C Series Temperature Input Module
783863-01
8-Channel, 400 S/s Aggregate, 0 Ω to 400 Ω, PT100 RTD C Series Temperature Input Module - The NI‑9216 is a resistance temperature detector (RTD) input module. You can configure the NI‑9216 for two sample rate modes: high sample rate or high resolution. The NI‑9216 is compatible with 3‑ and 4‑wire RTD measurements, and it automatically detects the type of RTD (3-‑or 4‑wire) connected to the channel and configures each channel for the appropriate mode. The module provides per channel current excitation. The NI‑9216 features calibration and includes a channel‑to‑earth ground double isolation barrier for safety, noise immunity, and a high common-mode voltage range.
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NI-9212, 8-Channel, 95 S/s/ch Simultaneous, ±78 mV C Series Temperature Input Module
782975-01
8-Channel, 95 S/s/ch Simultaneous, ±78 mV C Series Temperature Input Module - The NI‑9212 offers channel‑to‑channel, isolated thermocouple input channels. The NI‑9212 channel‑to‑channel isolation protects channels from continuous voltages up to 250 Vrms and transient (withstand) voltages up to 1500 Vrms. You can use the NI‑9212 in a variety of applications that are not conducive for bank-isolated channels such as white goods testing, in-vehicle data logging, battery stack testing, as well as in various other noisy industrial environments.
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NI-9211, 4-Channel, 14 S/s/ch, ±80 mV C Series Temperature Input Module
779001-01
4-Channel, 14 S/s/ch, ±80 mV C Series Temperature Input ModuleThe NI‑9211 includes anti-aliasing filters, open-thermocouple detection, and cold-junction compensation for high-accuracy thermocouple measurements. The NI‑9211 features NIST‑traceable calibration and a channel‑to‑earth ground double isolation barrier for safety, noise immunity, and high common-mode voltage range.
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Thermal Chuck Systems
C-Series
Advanced Temperature Test Systems GmbH
Looking for a chuck system that gives you the possibility to cool down to - 60C and up to + 300C. The C-Series represents a product line of air cooled thermal chuck systems for a wide temperature range
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Drill Chuck Grips
Metal rods, wires, and plates and electronic components can be tensile tested using drill chuck grips. Electronic components are tested by placing the metal legs of the components in the grips, allowing different shaped components to be tested with the same set of grips.
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Vacuum Chuck Temperature Controlled Test Stations
These test stations offer the same reliable repeatable measurement capability of our temperature monitored stations with the added dimension of temperature control.
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Standard Probe Station Chucks & Accessories
In this test solutions section of our website we describe the expanding line of Abet PV IV probe stations for the growing variety of solar cell types and sizes being developed around the world. This page describes a line of vacuum chucks and accessories for top/bottom, top/top, and bottom/bottom solar cells from 3 x 3 mm to 300 x 300 mm. Probe stations for multiple device on a single substrate and multifunction probe stations are described further in the sections highlighted to the left of this page.
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Wafer Chucks
ARC, in addition to fabricating Wafer Chucks from aluminum, is also known for its ability to work in hard to machine materials such as hardened (50-62 Rockwell) metal alloys, fired ceramics, e.g. SiC and glasses. These materials are often ideal for semiconductor equipment applications due to their ability to hold critical dimensions and tolerances. ARC specializes in surface grinding and lapping these materials to precision flatness and parallelism specifications needed for semiconductor wafer chuck requirements.
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Thermal Chuck Systems
L-Series
Advanced Temperature Test Systems GmbH
The perfect system for high power applications with an extraordinary performance at a wide temperature range between - 65C and + 300C.Each system contains a high performant liquid-cooling unit.
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Thermal Controlled Chucks & Plates
TOP Cool
Mechanical Devices newest innovation in thermal testing. Each TP system contains a thermal chuck or thermal plate and a self-contained thermal control unit.The TP chuck and platforms is a breakthrough product that introduced the use of refrigerant for active cooling & heating of wafers and other components with no need of chiller, CDA, or consumable and expensive refrigerants such as liquid nitrogen and liquid carbon dioxide. It can be a perfect replacement system in the industry for uncompromising thermal and mechanical performance with a temperature ranging from -60 to +220°C.
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Temperature Chambers
FTU Series
The Bemco FTU Series temperature chambers are designed for use with universal (physical) test machines to allow evaluation of specimens under controlled environmental conditions.
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Temperature Controller
8C
The Series 8C Temperature Controller offers easy-to-use programming menus designed for quick installation. The unit is designed for direct or reverse acting (cooling or heating) control. The Series 8C can be programmed for simple ON/OFF or more complex PID control functions.
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Barometric + Temperature
The Track-It™ Barometric Pressure/Temperature Data Logger is a battery powered stand alone compact data logger that records up to 64,000 samples of Barometric Pressure and/or Temperature data. The unit is easily configured using the included Track-It™ Software.
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Temperature Loggers
A range of PC based Temperature Data Loggers for education, research and industry.
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Temperature Probe
*For surface and air/gas temperature measurement*Not suitable for liquids*Measurement range: -40°F to 399°F (-40°C to 204°C)*Probe length: 39.4 IN ±0.2IN (1 m ±5 mm)*Type K thermocouple*Lifetime Limited Warranty