Thin Film
layer of material ranging < a nanometer to > a micrometer in thickness.
See Also: Film, Ellipsometers
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Thin Film
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Substrates: ceramics, glass, soft substrates. Conductor: Au, Pt, Pd, Ni, Cu, Ta, WTi. Dielectrics: Polyimide, SiN. Micro strip and coplanar design. Through hole metallisation, filled via. Integrated resistor and capacitor. Air bridges. Polyimide Multilayer.
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Thin Film Design Software
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Scientific Computing International
SCI offers software tools for optical thin film design, material analysis, ellipsometry, and spectrophotometry. SCI’s current standalone optical thin film software includes:
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Scatterometers/ Thin Film Metrology Systems
LittleFoot Series
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The n&k LittleFoot-CD, and LittleFoot-CD450 are DUV-Vis-NIR scatterometers/thin film metrology systems, based on polarized reflectance measurements (Rs and Rp) from 190nm to 1000nm, with microspot technology. The systems in the LittleFoot-CD Series determine thickness, n and k spectra from 190nm-1000nm of thin films, as well as depths, CDs, and profiles of trenches and contact holes.
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Spectroscopic Ellisopmeter for Simple Thin Film Measurement
Auto SE
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The Auto SE is a new thin film measurement tool that allows full automatic analysis of thin film samples with simple push button operation.Sample analysis takes only a few seconds and provides a complete report that fully describes the thin film stack – including film thicknesses, optical constants, surface roughness, and film inhomogeneities.
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In-Situ Spectroscopic Ellipsometer for Real-Time Thin Film Monitoring
UVISEL Plus In-Situ
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The UVISEL Plus in-situ spectroscopic ellipsometer can be easily mounted on process chambers (PECVD, MOCVD, sputter, evaporation, ALD, MBE) for the real-time control of thin film deposition or etch processes.The UVISEL Plus in-situ provides the unique combinations of very high speed, sensitivity, dynamic range and accuracy making the instrument able to control deposition / etch at the atomic layer thickness level, even for rapid processes.
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Thin Film Chip Resistors, High Voltage Type
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Panasonic Industrial Devices Sales Company of America
Thin Film Chip Resistors, High Voltage Type by Panasonic
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Thin Film Based Thermopile Detector: 10 Channels
10 Channel
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A ten-channel thin-film thermopile in a TO-8 package. Each active area is 3.16mm x 0.4mm and offers low noise voltage. Internal aperture minimizes channel-to-channel crosstalk while increasing sensitivity.
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Scatterometer with Thin Film Measurement Capabilities
OptiPrime-X Series
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The n&k OptiPrime-X series are automated metrology systems used to fully characterize and monitor Thin Film and OCD applications for both current and next generation IC processes.
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Thin Film Circuits
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SemiGen offers build-to-print services for a wide range of materials and metallization schemes. We use our processing technology to fabricate circuits on As-Fired Alumina, Polished Alumina, Superstrate TPS, Aluminum Nitride, Beryllium Oxide, Fused Silica/Quartz, Sapphire, and Hi-K Dielectrics.
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Reference Ellipsometer for Thin Film Measurements
UVISEL Plus
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The UVISEL Plus ellipsometer range offers the best combination of modularity and performance for advanced thin film, surface and interface characterization. FastAcq technology enables a sample measurement from 190 to 2100nm to be completed within 3 minutes, at high resolution. The possibility to continuously adjust the spectral resolution along the measurement range enables to scan a sample smarter and faster.
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Thin Film Metrology Systems
Gemini Series
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The n&k Gemini-TF, Gemini-TF-M and Gemini-FPD are specifically designed for measurements of patterned and unpatterned films on transparent or opaque substrates. These tools are used extensively for solar cell, flat panel and photomask applications. The tools belonging to the Gemini-TF Series are based on unpolarized Reflectance (R) and unpolarized Transmittance (T) measurements, with a 50μm spot size for both R and T. R and T are simultaneously measured to determine film thickness and n and k spectra from 190nm – 1000nm
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Thin Film Based Thermopile Detector: 3 Channels
TM34
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A three-channel thin-film thermopile in a TO-8 package. Each symmetrically positioned active area is 3.16mm x 0.4mm. Offers low noise output and internal aperture minimizing channel-to-channel crosstalk while increasing sensitivity.
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Thin Film Lithium Tantalate (TFLT™) Pyroelectric Detectors
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For room temperature measurement of THz sources, from nW to mW.
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Thin Film Composition and Thickness Monitor
P-1000
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The Precision P-1000 readily analyzes compound thin films utilized in semiconductor, superconductor, magnetic and applications.
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Thin Film SPY Inspection w/ Built In Jeep Meter
780
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For thin film coatings the easy-carry and easy to handle SPY Model 780 speeds inspection time with its built in Jeep meter and various other time saving and comfort features.
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Passive and Active Resistor Trimming for Thick and Thin Film
LRT 2000L
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*Travel: 6" x 6"*Laser : Fiber Laser Ytterbium 1064 nm*Kerf: 30 to 80 micron Adjustable*Pulse width : 80 nano second*Rap Rate: 1 to 1 million Pulse Per Second*Average Power: 20 watts*Target: Electric crosshair on monitor
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Scatterometers / Thin Film Metrology Systems
OptiPrime Series
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The n&k OptiPrime series are automated metrology systems used to fully characterize and monitor Thin Film and OCD applications for both current and next generation IC processes.
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Ultra Thin Film Scratch Tester
CSR5100
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The micro-scratch method (JIS R-3255), which is an evolution of the scratch method that evaluates the adhesion strength between the thin film formed on the material surface and the base material, enables the detection of peeling of thin films. detection, we have a highly sensitive destruction detection mechanism based on our own patented technology (Patent No. 5070146) to evaluate the adhesion strength of ultra-thin
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Mixers/Receivers In Terahertz Range
Hot Electron Bolometer (HEB)
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Insight Product Company offers Hot Electron Bolometer (HEB) mixers, receivers, and chips made from NbN or NbTiN thin film. The HEB mixers can operate at frequencies of up to several terahertz. Advantages: Above about 1 THz Hot Electron Bolometer mixers offer the best sensitivity and lowest noise of all the technology for the coherent detection of radiation.
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Benchtop Amplifiers
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Benchtop, broadband driver amplifiers are designed and manufactured by utilizing the most advanced PHEMT or MMIC devices, thin film technologies, and an improved DC power supply to deliver a high output power and a superior gain flatness and low noise performance. The standard offering focuses on general purpose applications and covers the frequency range of 1 to 110 GHz. However, custom designs are also offered to meet any user’s specific needs.
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Benchtop Metrology Solution
FilmTek 2000 PAR-SE
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Scientific Computing International
Our most advanced benchtop metrology solution, engineered to meet the needs of nearly any advanced thin film measurement application, from R&D to production. Combines spectroscopic ellipsometry and DUV multi-angle polarized reflectometry with a wide spectral range to deliver the highest accuracy, precision, and versatility in the industry. Patented parabolic mirror technology allows for a small spot size down to 50µm, ideal for direct measurement of product wafers and patterned films.
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1550 & 1310/1490nm MWDM
WD1543
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Hangzhou Huatai Optic Tech. Co., Ltd.
WD1543 WDM is based on mature thin film filtering tech, with wide bandwidth, flatness, low insertion loss and high isolation. It is mainly applied to FTTx PON network to achieve the combination and separation of the 1550nm (CATV) and 1310/1490nm (data).
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Hybrid Amplifiers
Limiting
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Macom Technology Solutions Holdings Inc.
MACOM offers a complete line of RF and microwave limiting amplifiers. Our limiting amplifiers use the latest thin film hybrid manufacturing techniques to obtain the highest level of performance, repeatability, and reliability. MACOMs portfolio of amplifiers range from 10 MHz to 4 GHz and are ideally suited for hi-reliability and mission critical applications.
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C-Band / L-Band MWDM
WD1615/C, WD1516/L
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Hangzhou Huatai Optic Tech. Co., Ltd.
WD1615/C, WD1516/L WDM is based on mature thin film filtering tech, with wide bandwidth, flatness, low insertion loss and high isolation. It is mainly applied to EDFA and DWDM network to achieve the combination and separation of C-Band and L-Band.
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1550/1310~1490nm Wavelength Division Multiplexer
PON-WDM-1543
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Hangzhou Huatai Optic Tech. Co., Ltd.
PON-WDM-1543 WDM is based on mature thin film filtering tech, with wide bandwidth, flatness, low insertion loss and high isolation. It is mainly applied to FTTx PON network to achieve the combination and separation of the 1550nm (CATV) and 1310/1490nm (data).
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Film Thickness Mapping Systems
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Angstrom Sun Technologies, Inc.
Spectroscopic reflectometer mapping (SRM) tools are for industry or lab routine thin film uniformity measurement. This is relatively low cost and easy to use setup. Mapping size can be configured from 2" to 18" if needed. Dependent on film thickness range, a broad wavelength range can be configured within DUV, Vis and/or NIR range. A user-friendly software interface allows you to define various mapping patterns to map. A CCD array based detecting and data acquisition mechanism offers fast measurements. 2D/3D data presentation gives user option to quickly generate reports.
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CWDM Mux/Demux in 1U Rackmount(4,8,16,18-Channel)
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Flyin Optronics’ Coarse wavelength division multiplexer (CWDM Mux/Demux) utilizes thin film coating technology and proprietary design of non-flux metal bonding micro optics packaging. It provides low insertion loss, high channel isolation, wide pass band, low temperature sensitivity and epoxy free optical path.
