Plasma Generators
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RF Plasma Generators
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Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
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The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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High Power Microwave Plasma System
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The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Plasma Power Generators
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Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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Elite™ 13.56 MHz RF Plasma Generators
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The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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Low Frequency RF Broadband Power Sources
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Class A has RF power source, ideal for Industrial /Scientific / Medical applications. Class AS is a robust source of RF power for ultrasonic, laser modulation, RFI/EMI, plasma generation, general laboratory and industrial applications.
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Remote Plasma Sources
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Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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In Situ Diagnostics
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For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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12GHz 16-Channel Signal Generator 19" 3U Rack Module
LS12916R
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The LS12916R, 12GHz 16 channel RF Analog Signal Generator, offers industry leading performance, in a 3U, 19” space efficient, rack-mounted box. The LS12916R features 16 phase coherent channels, exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. With the highest channel density in the market the LS12916R offer the ideal solution for applications requiring high channel count at minimum space and cost.
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PXI-5421, 43 MHz Bandwidth, 16-Bit PXI Waveform Generator
778697-03
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43 MHz Bandwidth, 16-Bit PXI Waveform Generator—The PXI‑5421 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5421 also features advanced synchronization and data streaming capabilities.
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6GHz Four Channel Signal Generator
LS6084B
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The LS6084B is a 6GHz Four Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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PXI/PXIe Arbitrary Generators
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The arbitrary waveform generators of the PXA72xx family are characterized by a resolution of 16 bits with a maximum sample rate of 200 MS per second. The devices can also be used to directly output voltages of up to 30 V (or ±15 V).
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6GHz Four Channel Signal Generator 19" 1U Rack Module
LS6084R
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The LS6084R, 6GHz four channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” space efficient, rack-mounted box. The LS6084R features four phase coherent channels, exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS6084R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Dual/Quad 125 MS/s VXI Arbitrary Waveform Generator
3164
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The Racal Instruments™ 3164 Series is a single-wide VXIbus Module. The 3164-2 has two 14-bit Arbitrary Waveform Generator (AWG) channels that operate independently, and the 3164-4 AWG has four channels. The maximumsample rate for each channel is 125 MS/s. All waveforms can be sampled from data previously loaded into waveform memory or loaded and output on the fly.
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2.5GS/s 16Bit 2GS Mem 4CH Arbitrary Waveform Generators
P2584B
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The Proteus P2584B, is a 2.5GS/s, four channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P2584B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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9GS/s 16Bit 8GS Mem 4CH 8 Markers RF AWG Benchtop
P9484B
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The benchtop version of the Proteus arbitrary waveform generator series offers up to 12 channels in a 4U, 19” benchtop box. With a 9” touch display and on-board PC the benchtop platform enables users to program the instrument without the need of an external PC. Users can program the instrument from the onboard PC using various programming environments such as MATLAB, LabView, Python, and more. So for synchronized, phase coherent, multi-channel applications such as quantum physics and radar applications the Proteus arbitrary waveform transceiver is an ideal, high performance, and cost effective solution
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9GS/s 8 Bit, 4GS Mem 4CH 16 Markers AWG
P9084B
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The Proteus P9084B, is a 9GS/s, four channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P9084B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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9GS/s 8 Bit, 4GS Mem 6CH 24 Markers AWG
P9086B
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The Proteus P9086B, is a 9GS/s, six channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P9086B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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UXG X-Series Agile Signal Generator, Modified Version
N5191A
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et closer to reality: simulate increasingly complex signal environments for radar, EW & antenna-test Test sooner & increase confidence in EW systems by generating signal simulations when you need them: the UXG is a scalable threat simulator Use pulse descriptor words (PDWs) to generate long pulse trains & individually control pulse characteristics Quickly characterize antennas over a wide frequency range with fast frequency tuning Performance without requiring an export license
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PXIe Arbitrary Waveform Generator, 500 MSa/s, 16 bit, 200 MHz
M3201A
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The M3201A PXIe arbitrary waveform generator is ideal for general purpose AWG automated test requirements. It offers high channel density with high-quality output with low phase noise. The optional real-time sequencing, intermodulation synchronization, and graphical FPGA programming software tools expand its capability to enable a number of solutions including envelope tracking (ET) and DPD (part of PA/FEM reference solution), MIMO, baseband electronics design, wireless device manufacturing, ATE, beamforming and other multi-channel coherent signal generation and multi-channel signal generation.
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Waveform Generator, 20 MHz, 1 Channel
EDU33211A
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The EDU33211A single channel function / arbitrary waveform generator brings uncompromising performance to an entry-level function generator.
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2.5GS/s 16Bit 2GS Mem 12CH Arbitrary Waveform Generators
P25812B
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The Proteus P25812B, is a 2.5GS/s, twelve channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P25812B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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AT-1120, 14-Bit, 2 GS/s, 2-Channel Signal Generator Adapter Module for FlexRIO
782248-01
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The AT-1120 provides simultaneously sampled analog output channels for signal generation. It also features single-ended, DC-coupled inputs. The AT-1120 is ideal for generating complex signals like digital modulations and RF stimuli for functional and performance tests. Each channel has a user-configurable sample rate, and data is written directly from the FPGA. To use the AT-1120, you must pair it with a compatible PXI FPGA Module for FlexRIO.
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2.5GS/s 16Bit 2GS Mem 8CH 16 Markers Arbitrary Waveform Generators
P2588B
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The Proteus P2588B, is a 2.5GS/s, eight channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P2588B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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PXI-5412, 20 MHz Bandwidth, 1-Channel, 14-Bit PXI Waveform Generator
779176-03
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20 MHz Bandwidth, 1-Channel, 14-Bit PXI Waveform Generator - The PXI‑5412 is a 20 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
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50MS/s Four-Channel Arbitrary Waveform Generator
WW5064
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The WW5064 offer a 50 MS/s four-channel universal waveform synthesizer. Each is built in a small case size to save space and cost but without compromising bandwidth and signal integrity. The instrument outputs either standard or user-defined waveforms in the range of 100µHz and up to 25MHz.
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PCI-5412, 100 MS/s, 14-Bit Waveform Generator Device
779177-02
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The PCI‑5412 can generate user-defined, arbitrary waveforms and standard functions, including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
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EXG X-Series RF Analog Signal Generator, 9 kHz to 6 GHz
N5171B
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Achieve faster throughput and greater uptime with the cost-effective performance optimized for manufacturing testPerform basic parametric testing of components and functional verification of receivers with industry-leading output powerThoroughly verify receiver performance by simulating complex analog modulation scenarios with multi-function generator capabilityMinimize downtime and expenses with self-maintenance solutions and low-cost repairs
