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Plasma Generators
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RF Plasma Generators & Amplifiers
100 W to 2400 W 13.56 MHz Analog/Digital, RS-232, USB interfaces Low Harmonic Distortion Automatic and Manual Gain Control High Speed Pulsing (Bursting) controls Compatible with T&C''''s Matching Networks GUI Software (complete PC control) Includes all essential RF power/communication cables and mounting brackets Air cooled (Air & Water 1200 W +) Half rack mount or stand alone versions Ideal for: Industrial, Scientific, and Medical Applications
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Elite™ 13.56 MHz RF Plasma Generators
The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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2 MHz RF Plasma Generators
NOVA® Series
The NOVA ; RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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High Power Microwave Plasma System
The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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RF Plasma Generators
Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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Plasma Power Generators
Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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Remote Plasma Sources
Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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In Situ Diagnostics
For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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PXI/PXIe Arbitrary Generator Family
PXA(e)72xx
The arbitrary waveform generators of the PXA72xx family feature 16-bit resolution at a maximum sample rate of 200 ms per second. Furthermore, the devices can directly output voltages up to 30 V (or ±15 V).
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PXI-5421, 43 MHz Bandwidth, 16-Bit PXI Waveform Generator
779176-01
43 MHz Bandwidth, 16-Bit PXI Waveform Generator—The PXI‑5421 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5421 also features advanced synchronization and data streaming capabilities.
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PXIe-5450, 145 MHz Bandwidth, 16-Bit, 512 MB, I/Q PXI Waveform Generator
780419-02
PXIe, 145 MHz Bandwidth, 16-Bit, 512 MB, I/Q PXI Waveform Generator—The PXIe‑5450 is a 145 MHz, dual‐channel arbitrary waveform generator optimized for I/Q communications signals. It is an ideal instrument for testing devices with I/Q inputs, or as the baseband component of an RF vector signal generator. The PXIe‑5450 also features onboard signal processing (OSP) functions that include pulse shaping and interpolation filters, gain and offset control, and a numerically controlled oscillator (NCO) for frequency shifting. The PXIe‑5450 also features advanced synchronization and data streaming capabilities.
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PXI-5651, 3.3 GHz RF Signal Generator
779670-01
3.3 GHz PXI RF Analog Signal Generator—The PXI‑5651 features continuous-wave generation capabilities with FM, 2‑FSK, or OOK modulation. It uses direct digital synthesis (DDS) for high-resolution frequency hopping or phase-continuous sweeping for fixture and device characterization applications. The PXI‑5651 is ideal for clocking nonstandard sample rates, such as WCDMA signals at baseband or intermediate frequency (IF). With these versatile signal generators, you can perform analog and digital modulation through the onboard DDS circuit, which gives you frequency modulation and frequency-shift keying for applications such as bit error rate test, antenna testing, or even keyless entry. You can also perform amplitude modulation using on-off keying.
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PXI-5421, 43 MHz Bandwidth, 16-Bit PXI Waveform Generator
778697-02
43 MHz Bandwidth, 16-Bit PXI Waveform Generator—The PXI‑5421 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5421 also features advanced synchronization and data streaming capabilities.
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1.25GS/s 16Bit 1GS Mem 4CH Arbitrary Waveform Generators
P1284B
The Proteus P1284B, is a 1.25GS/s, four channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P1284B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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PXI-5441, 43 MHz Bandwidth, 16-Bit, Onboard Signal Processing PXI Waveform Generator
779058-02
43 MHz Bandwidth, 16-Bit, Onboard Signal Processing PXI Waveform Generator —The PXI‑5441 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms, standard functions including sine, square, triangle, and ramp, as well as signals that require onboard signal processing. Some of these signal processing operations include FIR and CIC interpolation filters, digtal prefilter gain, numerically-controlled oscillator, and I/Q mixing for quadrature digital upcoversion. The PXI‑5441 also features advanced synchronization and data streaming capabilities.
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2.5GS/s 16Bit 2GS Mem 2CH 8 Markers AWG
P2582D
The Proteus P2582D, is a 2.5GS/s, dual channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P2582D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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PXI Waveform Generator
PXI Waveform Generators can produce precise waveforms including sine, square, triangle, and ramp as well as arbitrary, user-defined waveforms using sequences of data or streaming continuously from a host or peer-to-peer instrument within the PXI system. These instruments are ideal for tightly synchronized, mixed-signal test systems in scientific research or test of semiconductor devices, consumer electronics, automotive, and aerospace/defense.
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6GHz Dual Channel Signal Generator 19" 1U Rack Module
LS6082R
The LS6082R, 6GHz dual channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” space efficient, rack-mounted box. The LS6082R features two phase coherent channels, exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS6082R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Four Channel Arbitrary Waveform Generator 1.25GS/s 16Bit 1GS Mem 4CH 4 Markers AWG
P1284M
The Proteus P1284M, is a PXIe based, 1.25GS/s, four channel arbitrary waveform generator offering technologically advanced options and configurations such as, a dual channel 2.7GS/s digitizer with 9GHz bandwidth, to transform the instrument to an arbitrary waveform transceiver. The P1284M offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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40GHz Dual Channel MW Signal Generator 19" 1U Rack
LSX4092R
The LSX4092R is a 40GHz Dual Channel Microwave Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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PXI-5422, 80 MHz Bandwidth, 16-Bit PXI Waveform Generator
779087-02
80 MHz Bandwidth, 16-Bit PXI Waveform Generator - The PXI‑5422 is a 80 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5422 also features advanced synchronization and data streaming capabilities.
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Dual Channel Arbitrary Waveform Generator 9GS/s 8Bit, 4GS Mem 2CH 8 Markers AWG
P9082M
The Proteus P9082M, is a PXIe based, 9GS/s, dual channel arbitrary waveform generator offering technologically advanced options and configurations such as, a dual channel 2.7GS/s digitizer with 9GHz bandwidth, to transform the instrument to an arbitrary waveform transceiver. The P9082M offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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2-Channel Arbitrary Waveform Generator
3156C
Racal Instruments™ 3156C Dual Channel Arbitrary Waveform Generator outputs 16-bit waveforms from 2 channels at up to 225 MS/s. 12-bit digital patterns may be output at rates up to 200 Mbits/s.
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PCI-5421, 100 MS/s, 16-Bit Waveform Generator Device
778692-01
The PCI‑5421 can generate user-defined, arbitrary waveforms and standard functions, including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PCI‑5421 also features advanced synchronization and data streaming capabilities.
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204.8 kSa/s Smart PXIe Arb. Waveform Source
EMX-1434
The VTI Instruments EMX-1434 is an arbitrary source/tach high performance modular PXIe board. It is uniquely designed for sound/vibration and DSA applications and can be easily synchronized with digitized data giving the capability to combine the required source and signal analysis into one single chassis to maximize flexibility. The module can also functions as a high-performance arbitrary waveform generator for electronic test applications requiring standard function generator capability, or the need to generate custom-defined waveforms.
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6GHz Dual Channel Signal Generator
LS6082B
The LS6082B is a 6GHz Dual Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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9GS/s 8Bit, 4GS Mem 6CH 24 Markers AWG
P9086D
The Proteus P9086D, is a 9GS/s, six channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P9086D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
