Mask
screens a surface or a signal to a certain shape.
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Large Substrate Mask Aligner
Model 6020
The Model 6020 is a large substrate Production Mask Aligner or Auto-flood Exposure System for RDL First Level Advanced Packaging (PLP) and markets requiring exposure of large glass panels. It is engineered with OAI’s precision, reliability, and quality that is found in all of OAI’s products. The features include wedge effect leveling, superb process repeatability, ≤ 2.0µm printing resolution, and remote diagnostics. Using robotic handling, the system can stand alone or be fully integrated with photo resist processing.
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Tabletop Front & Backside Mask Aligner
Model 200IR
The OAI Model 200IR Mask Aligner is a tabletop system that requires minimal clean room space. It is a cost-effective alternative for R&D or limited scale, pilot production. Utilizing an innovative, air bearing / vacuum chuck leveling system, the substrate is leveled quickly and gently, for parallel photo mask alignment and uniform contact across the wafer during contact exposure. The Model 200IR Mask Aligner is capable of one micron resolution and alignment precision. It has an alignment module which features mask insert sets and quick-change wafer chucks that enable the use of a variety of substrates and masks without requiring tools for reconfiguration. The alignment module incorporates micrometers for X, Y, and z-axis.
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Reticle / Mask Particle Detection System
PR-PD2HR
In semiconductor plants, where high performance and demanding functionality are required, the HORIBA PD Series'' high operating rate and long-term dependability have earned it a solid reputation. Inheriting a transfer system that has proven to provide stable, high performance and superior throughput over long operating periods, the PR-PD2HR now offers the most sensitive detection in the series with exclusive signal processing that can detect particles as small as 0.35 m.
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GENERAL INSPECTION MACHINE AFTER SOLDER MASK
DVI is a technology of automated optical inspection, which can inspect deep to the difference from semi-transparent layers or semi-reflective layers.
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MASK MVM-SEM® E3600 Series
E3630
Together with the miniaturization of semiconductors, high-accurate and stable measurement and evaluation is needed for circuit patterns such as mask patterns and holes. Advantest's E3600 series are used by a wide variety of companies, from semiconductor manufacturers to photomask makers to device and materials producers.
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MASK DR-SEM
Our defect review SEM tools perform detailed reviews of minute defects on photomasks.
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Bounded Output Mask
The bounded output mask provides a means of ensuring that measurements of TI according to IEC 62359 can satisfy the requirement of only determining the ultrasonic output through an area of 1 cm x 1 cm.
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Automated Front & Backside Mask Aligner System
Model 6000
With over 4 decades of manufacturing in the semiconductor industry, OAI meets the growing challenge of a dynamic market with an elite class of production photolithography equipment. Built on the proven OAI modular platform, the Model 6000 has front and backside alignment that is fully automated with a submicron printing capability as well as submicron top to bottom front side alignment accuracy which delivers performance that is unmatched at any price. Choose either topside or optional backside alignment which uses OAI’s customized advanced recognition pattern software. These Mask Aligners have OAI’s Advanced Beam Optics with better than ±3% uniformity and a throughput of 200 wafers per hour in first mask mode, which results in higher yields. The Series 6000 can handle a wide variety of wafers from thick and bonded substrates (up to 7000 microns), warped wafers (up to 7 mm-10mm), thin substrates (down to 100 micron thick), and thick photo resist.
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Mask ventilation resistance and pressure differential tester
WKS-3102
Mask ventilation resistance and pressure differential tester is used to measure the inhalation and exhalation resistance of mask under specified conditions. Applicable to mask manufacturers, labor protection equipment inspection agencies to carry out related testing and inspection of mask products, mask breath resistance tester, breathing valve air tightness tester, breath resistance machine for measuring respirator and mask protection products in Inspiratory resistance and expiratory resistance under specified conditions.
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Medical Mask Gas Exchange Pressure Difference Tester
DRK371
Shandong Drick Instruments Co., Ltd.
It is used to measure the gas exchange pressure difference of medical surgical masks and other products.
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Custom Solutions for Mask Aligners
OAI offers custom designed solutions built to your unique specification.
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5000B-series Attitude Gyroscopes With Warning Flag
This gyro is a variation of our popular 5000B air-driven attitude gyro. It includes a warning flag that drops into view upon the loss of vacuum. This can be a life saving feature during an emergency in a busy cockpit. The horizon mask moves to indicate climb, dive, and bank attitudes, which are portrayed against a fixed airplane. The fluid movements and intuitive presentation provide the pilot with a realistic sense of the aircraft’s attitude in relation to the natural horizon.
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Oscilloscope - 350 MHz, 2 Analog Channels
DSOX4032A
350 MHz2 analog channels Easily view signals on the large 12.1-inch capacitive touch screen Isolate signals in seconds with exclusive Zone touch triggering Capture more data with 4 Mpts memory and standard segmented memory See more signal detail with 1,000,000 wfms/s update rate Expand your measurement capabilities with full upgradability: Add bandwidth, digital channels, dual-ch 20 MHz arbitrary Wave Gen, 3-digit DVM, serial trigger and analysis & mask testing
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Power Measurements For The 3000A/T/G X-Series
D3000PWRB
The power software package for Keysight’s InfiniiVision 3000A, 3000T, and 3000G X-Series oscilloscopes enables a broad range of automated power supply characterization measurements including critical frequency response measurements (3000T/G X-Series only) such as power supply rejection ratio (PSRR) and control loop response. This package also enables hardware-based pass / fail mask testing and USB PD triggering and decode (3000T/G X-Series only).
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Scanning Electron Microscope
E5620
The E5620 is a MASK DR-SEM(∗) product for reviewing and classifying ultra-small defects in photomasks and mask blanks. It implements Advantest’s highly stable image capture technology to easily import defect location data from mask inspection systems and automatically image the locations. Compared to the E5610, our predecessor DR-SEM system, the E5620 features a number of improvements designed specifically to target mask requirements for extreme ultraviolet (EUV) lithography.
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Breakthrough compressors for the GDSII and MEBES formats
GDZip + MEZip
Recognizing the challenge to transfer, manipulate, and store the exponentially-increasing size of IC design files, Solution-Soft has developed gdzip and mezip, breakthrough compressors for the GDSII and MEBES formats used by the industry. The MEBES format is the most commonly used format for electron beam lithography and photomask production. The GDSII stream is the standard exchange format between the design world and the mask shops.
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Media Files Player/Viewer/Analyzer/Converter
VQV
VQV is a compact, but powerful program, featuring: Raw YUV/Y4M/BMP files player with sophisticated viewer/analyzer functionality Wide range of frame sizes, input and output formats; powerful "Save as" file format converter Displays XY positions, YUV and RGB levels of every pixel; switchable zoom ratio and signal gain Automatic measurement of Active Image size and position – LetterBox and PillarBox detector YUV and RGB levels display, video frame information, Black Crash and White Crash statistical analysis Built-in high-gain spatial and temporal high-pass filters reveal even hardly visible artefacts Selectable RGB, Y, UV, R, G or B view channels, adjustable filter mask size and position Right-click submenu allows fast creation of snapshots or thumbnail .BMP images Running multiple VQV instances provides for quick frames/profiles comparison and benchmarking Easy-to-use tool, instantly revealing your video camera, codec, scaler, converter or other video device performance Input and output uncompressed video material data – bit by bit, pixel by pixel, frame by frame Fast and effective tool for 3G-SDI/HD-SDI/SDI/HDMI/LAN/WAN equipment testing and video data fidelity verification Ideal tool for development labs, software developers and high volume manufacturers
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Cageable Attitude Gyroscopes
5000M-series
The 5000M is an air-driven gyro that has a pictorial horizon mask and fixed airplane. The mask moves to indicate climb, dive, and bank. Bank and pitch attitudes are displayed so that the pilot’s sensing of the gyro indication is the same as the interpretation of the relation between the wings of the aircraft and the natural horizon during visual flight.
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Exposure Systems
Model 2012AF & 2012SM
The Model 2012AF Flood Exposure System provides a cost-effective method for automated flood exposure. Designed to accommodate wafers from 8” to 300mm, the tool features automated FOUP loading. Mask and substrate changeover can be accomplished quickly and easily adding to both versatility and high-volume throughput of this production tool.The Model 2012SM Automated Edge-bead Exposure System provides a cost-effective method for edge-bead removal using standard shadow mask technology. Designed to accommodate wafers from 8” to 300mm, the tool features automated FOUP loading. Mask and substrate changeover can be accomplished quickly and easily adding to both versatility and high-volume throughput of this production tool.
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Masks Flame Retardant Performance Tester
WKS-1208
WKS-1208 Masks Flame Retardant Performance Tester is used to test the burning performance of the mask after contacting the flame at a certain linear velocity. It is special test instrument for the flame retardant performance of masks.
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Reticle Manufacturing
An error-free reticle (also known as a photomask or mask) represents a critical element in achieving high semiconductor device yields, since reticle defects or pattern placement errors can be replicated in many die on production wafers. Reticles are built upon blanks: substrates of quartz deposited with absorber films. KLA’s portfolio of reticle inspection, metrology and data analytics systems help blank, reticle and IC manufacturers identify reticle defects and pattern placement errors, thereby reducing yield risk.
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Outdoor Infrared Motion Sensor
ENVIROMUX-IMD-O
Outdoor weatherproof - high reliability against water and insects. Double conductive shielding to eliminate false alarms from light sources. Registers movement in the area covered: 40 ft (12 m) x 50 ft (15 m) - 120° wide. LED lights during detection. Selectable detection paterns: Multi-Level (40 zones) or Pet Alley (18 zones). Unwanted detection areas can be eliminated using the included area masking strips. Selectable Sensitivity: High, Mid and Low. Adjustable to the brightness of surrounding environment with the Day/Night Mode switch. Tamper switch opens when cover is removed. Screw terminal. To connect to the RJ45 inputs use CAT5/5e/6 cable terminated at one end with RJ45 connector. Connect the un-terminated end to the sensor screw terminal. Operating temperature: -4 to 122°F (-20 to 50°C). IP54 compliant. Powered by ENVIROMUX-2D/5D/16D.
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Aerospace And Defense Software (3000A/T/G X-Series)
D3000AERB
MIL-STD 1553 and ARINC 429 triggering and analysis for the InfiniiVision 3000A, 3000T, 3000G X-Series oscilloscopes, along with mask testing, advanced math, video analysis, and more.
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Mixed Signal Oscilloscope: 70 MHz, 2 Analog Plus 8 Digital Channels
MSOX2002A
70 MHz2 analog plus 8 digital channels Easily view your signals on the 8.5-inch WVGA display Capture more data with up to 1 Mpts memory See more signal detail with 50,000 wfms/s update rate Expand your measurement capabilities with full upgradability: Add 20 MHz function generator, 3-digit voltmeter, serial trigger and analysis, segmented memory & mask testing at any time Easily set up teaching labs with our free Educator's Resource Kit
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Dip Coating Systems
SCS Dip Coating systems, which are available in free-standing floor or tabletop models, are specifically designed for production applications that do not require large in-line systems. SCS dip coating systems can be used to apply a range of coatings, as well as photo-resists and solder masks, that are part of printed circuit board applications all with a level of precision that manufacturer's demand. Both SCS models include a host of features that make them an ideal choice for lab and production operations.
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High-Mount Outdoor Infrared Motion Sensor
ENVIROMUX-IMD-OHM
High-mount outdoor weatherproof sensor with 94 detection zones. Unique pyro-element provides multiple pattern detection and accurate discrimination function for spot temperature changes of moving objects. Drastically reduces false and missed alarms caused by severe outdoor environmental changes. Upper and lower area must be activated to generate an alarm condition. Summer night compensation, advanced temperature compensation, and vegetation sway analysis logic. Ideal detection area setting – adjustable length/spot detection. Registers movement in area covered: 13/18/30/40 ft and 85° wide. LED indicators for operation and system status. Unwanted detection areas can be eliminated using the included area masking seal. Mounting height: 8.3 to 10 feet. Tamper switch opens when cover is removed. Screw terminal. To connect to the RJ45 inputs use CAT5/5e/6 cable terminated at one end with RJ45 connector. Connect the un-terminated end to the sensor screw terminal. Operating temperature: -4 to 140°F (-20 to 60°C). IP54 compliant. Powered by ENVIROMUX-2D/5D/16D.
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Aerospace and Defense Software for the 4000 X-Series
D4000AERB
MIL-STD 1553 and ARINC 429 trigger and decode for the InfiniiVision 4000 X-Series oscilloscopes, along with mask testing, frequency response analysis, and video analysis
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PXIe Modular Oscilloscopes
M924XA
200 MHz, 500 MHz and 1 GHz bandwidths2 analog channels and 5 GSa/s sample rate See more signal detail with 1,000,000 wfms/s update rate Quickly isolate signals with zone triggering Also available: 20 MHz arbitrary waveform generator, 3-digit voltmeter, serial trigger/analysis and mask testing
