NAPSON Corp.
Developing, manufacturing and selling measurement systems and software for silicon wafers/ingots and FPD process production
- +81-3-3636-0286
- +81-3-3636-0976
- 2-36-12, Kameido
Tokyo, Koto-ku, 136-0071
Japan
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Product
Wafer Flatness Measurement System
FLA-200
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*Measures Thickness, TTV, Bow, Warp and site and global Flatness (ASTM compliance)*Measures all materials including Si, GaAs, Ge, InP, SiC*Full 500 micron thickness measurement range without re-*calibration2-D /3-D Mapping software
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Product
Non-Contact (Pulse-Voltage Excitation Method) Ultra-Low Sheet Resistance Measurement System
PVE-80
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*No damage measurement by non-contact Pulse-Voltage excitation method*Easy to measure & carry around, Removable stage plate*Easy operation and data processing by PC with Software*Measurement result can shown by 3 types of measurement unit (Sheet resistance[Ohm/Sq], Electric conductivity[S/cm], Electrical conduction[S])*Pulse-Voltage excitation method : Pat. No.5386394 Joint development with Chiba Univ.
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Product
4 Point Probe Sheet Resistance/Resistivity Measurement with Temperature Controled System
TCR-600
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*Controlled Thermo-chuck (room temperature～600℃/less than 20 minutes)*600C compatible probe head with 1mm linear*Controlled with vacuum sensor, digital thermo-meter, vacuum gauge and gas flow meter*Temperature measuring accuracy：±（0.5% + 1℃）
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Product
Portable Pen-type Non-contact P/N Checker
PN-8LP
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*Principle: Photovoltaic effect with the 650nm laser diode*Power supply : DC1.5V(size AA alkaline battery), 300mA*Display of judgement : P(red) or N(green) LED lamps
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Product
Wide Measurement Range Model Of Semi-automatic 4 Point Probe Sheet Resistance/resistivity Measurement
RT-3000/RG-2000 (RG-3000)
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*User programable measurement pattern & programmable measuring pattern*Tester self-test function, wide measuring range*Thickness, edge, temperature correction for silicon wafer*Film thickness conversion function from sheet resistance*2 types measuring tester (S version: Standard type, H version: High range resistivity measurement type)
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Product
Non-contact Inline P/N Checker Module For Solar Wafer
PN-100BI
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*Principle: Photovoltaic effect with the laser diode*Suitable for production line and tranceportation system*Connect to host PC by LAN to send measurement command and data
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Product
Manual Four Point Probe Sheet Resistance/resistivity Measurement
RT70V series
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• Combinational measurement system by Measurement tester(RT-70V) & Stage.• Thickness input with easy JOG dial operation (RT-70V Tester)• Tester self-test function/Auto change-over measurement range function• Thickness & Temperature correction function for Silicon sample
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Product
Semi-auto 4 Point Probe System for Solar Cell Substrate
RG-100PV
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*Measurement system for thin film on substrate samples for multi-points measurement*Even pitch and random pitch for Max.1,000 points*2-D/3-D square mapping software for even pitch
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Product
Global Standard Model For 4 Point Probe Sheet Resistance Automatic Measurement System
RT-3000/RG-1000F
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*Fully automatic system for large sizes of flat panel with glass loading robot*Tester self-test function, Measurement position correction function, wide measurement range*Min. 0.1 mm meas. resolution and user programmable test pattern*Host (CIM) communication and 2-D/3-D Mapping software
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Product
Conductivity Type (P/N) Checker By Contact Thermo-electromotive Force Method (seebek Effect)
PN-12α
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*Thermo electrode and cold electrode is mounted detecting part of measuring probes*Possible to check most figure of sample such as single crystalline silicon wafer, bulk, ingot and so on*Please select from 2 types;1) 2 probe ver.(Hot probe, Cold probe),2) 1 probe ver.(Hot & Cold probe)
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Product
Life-time Measurement System For Silicon Bulks/ingots By JIS Method
HF-100DCA
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*Global standard model for the lifetime test of silicon bulk*JIS direct current anodizing method*Data processing by digital oscilloscope and PC with software
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Product
Fully Automatic Non-contact Sheet Resistance Measurement System For Flatpanel Display
NC-60F/RS-1300N
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*Global standard for non-contact measurement of ITO film, Metal thin films on flat panel*Automatic X-Y and Z (eddy current probe head) axis moving mechanism*Compatible with Loading robot for fully automatic measurementOption :*Integlate to combined system (film thickness meter, etc)*Add 4 point probe measurement unit : RT-3000
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Product
Hand Held Sheet Resistance Measurement Instrument[Replaceable Probe Set (Non-destructive Probe & Contact Probe) ]
DUORES
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Easy to measure sheet resistance & carry aroundReplaceable hand-held probes for Non-destructive & Contact type
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Product
Non-contact Ultra-High Range Sheet Resistance Measurement System
CRN-100
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*Ultra-High range sheet resistance measurement for 10E+9 ~ 10E+15 ohm/sq without contacting*Mapping program software;*1. Arranged in a multipoint pattern measurement is programmed*2. 2-D & 3-D mapping software*Easy operation by Windows 7 system software*Measurement data base link with Excel via CSV format file*Unaffected by contact resistance
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Product
Semi-Automatic Probe Sheet Resistance/Resistivity Measurement
CRESBOX
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• Multi-points measurement and Mapping display- 2-D map / 3-D map graphic display- Multipoint pattern measurement is programmed (maximum 1225 points) and random pattern is programmable by operator.• Film thickness conversion function from sheet resistance• Measurement data base link with Excel via CSV format file• Software language can be switched in English /Japanese by operator
