Ozone
Trioxygen
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Product
Ozone Analyzer
AQMS-300
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Concentration in ppb level by utilizing UV photometric absorption technology.
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Product
Ozone Meters
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In this section you will find an ozone meter to determine the content of ozone in the air or in the water. The ozone meter is essentially used in environmental technology, but the ozone meter is also used in industrial processes. The ozone meter in water is necessary for water treatment or recycling facilities, such as disinfection processes. The handling of the ozone meter is very simple. The recalibration of the ozone meter can be made by the user at any time. The ozone meter in air requires a more complicated calibration, usually a sensor works for two years with optimal results (little variation) before having to be changed.
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Product
Ozone Test
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Ozone is an extremely reactive form of oxygen occurring around electrical discharges. It is also present in the atmosphere, but in small quantities. Ozone testing is performed to determine the effect on materials such as rubber, plastics, etc, which are susceptible to ozone-induced degradation.
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Product
Stand-alone Ozone Delivery System For Advanced Processes
SEMOZON® AX8585
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SEMOZON® AX8585 stand-alone ozone gas delivery system is designed around the AX8410 PRIME ozone generator to provide high flow, high concentration, ultra clean ozone generation and delivery. This fully configurable product line is designed to meet the ever changing needs of the semiconductor industry. Each SEMOZON AX8585 is a fully integrated, high output ozone gas delivery system intended for use in an increasing number of semiconductor process applications such as ALD, CVD, TEOS/Ozone CVD, photoresist strip, wafer cleaning, contaminant removal, and oxide growth.
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Product
Broadband Xe Light Source
PowerArc
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75W Xe Ozone free light source for UV-Visible-NIR applicationsThe PowerArc™ is a complete, integrated light source that includes power supply, starter, high efficiency collection optics and lamp housing in one compact package.
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Product
Fully Integrated Modular Ozone Delivery System
SEMOZON® AX8580
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The SEMOZON® AX8580 Ozone Delivery System generates and delivers high flow, high concentration, ultra-clean ozone for advanced thin film applications. The SEMOZON AX8580 is specifically designed for use with an increasing number of semiconductor process applications such as ALD, CVD and TEOS/Ozone CVD.
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Product
Dissolved Gas Systems
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Dissolved gas in deionized water has been widely adopted in manufacturing processes in Electronics, Semiconductors, Flat Panel Displays and Solar applications. These wet techniques increase manufacturing productivity in particle lift-off and wet clean operations. Dissolved gases such as Ammonia, Carbon Dioxide and Ozone are environmentally friendly alternatives to heavy chemicals like sulfuric acid and peroxide acid solutions. MKS offers a large product line of Dissolved Gas systems that improve wet cleaning operations.
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Product
Chemitec Sensors And Analyzers To Monitor Oxidants In Water
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Chemitec's S494 series of amperometric probes provide continuous, accurate monitoring of chlorine and other oxidants in clean water applications. A range of sensors assures accurate measurement of oxidation, with sensors optimized for Chlorine (total, organic or inorganic), Chlorine Dioxide, Ozone, Peracetic Acid, Hydrogen Peroxide, Bromine, or Chlorites.
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Product
Multi-Channel Ozone Delivery System With In-rack Chiller
SEMOZON® AX8575
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The SEMOZON® AX8575 is a fully integrated, high output ozone gas delivery system that can be configured as a multi-channel system delivering ozone for up to 4 channels supporting multiple chambers or multiple tools. It has an optional in-rack chiller for ultra-high concentrations.
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Product
Catalytic Ozone Destructs
CAT-O3 Series
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Teledyne Advanced Pollution Instrumentation
The CAT-O3 series of ozone destructs safely decompose high concentrations of ozone gas to sub-ppm levels that are below recommended ozone safety limits. The catalytic method of decomposition uses a metal oxide catalyst to passively convert the ozone to oxygen.
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Product
Ozone Generators & Systems
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MKS offers a wide range of ozone generators and modular delivery systems which produce ultra-pure, reliable ozone gas. In the clean semiconductor environment, Ozone reacts with a wide range of precursor gases resulting in the creation of Al2O3, ZrO2, HfO2, and La2O3 metal oxides to enable thin film deposition processes like Atomic Layer Deposition (ALD) and Etch (ALE). MKS’ generator uses Grade 6 gas, enabling the creation of higher film density improving product yield. Photovoltaic and Display manufacturing leverage semiconductor best practices and utilize ozone to create enhanced thin film barriers, improving product performance and reliability.
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Product
Ozone Test Chamber
EKT-2001OZ-HPSSX
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Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Product
PRIME Ultra Clean, Ultra High Concentration, Ultra High Flow Ozone Generator
SEMOZON® AX8410
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The SEMOZON® AX8410 PRIME is the initial product offering in MKS' next generation platform of compact, high concentration, high flow, ultra clean ozone generators. It features a newly designed cell and power structure to achieve twice the ozone output of earlier models with a similar footprint.
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Product
Chemiluminescence 03 Analyzer
Model T265
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Teledyne Advanced Pollution Instrumentation
The Model T265 is the only commercially available US EPA Federal Reference Method for Ambient Ozone Monitoring according to the latest US EPA regulatory rules for O3. The instrument uses Chemilumescence with Nitric Oxide (NO) as a reagent, making is safe, stable, and effective for all applications. The NO-CL method for Ozone has several advantages over the conventional UV absorption technology, including the avoidance of positive and commonly found interferrents such as VOCs, fine particulates, Mercury, turpines, ClO2, and others. If these pollutants are present in the atmosphere, it can cause UV absorption analyzers to give an artificially high Ozone measurement. The innovative T265 combines speed of response, sensitivity and stability of our proven nitrogen oxide analyzer, with a simple user interface, to provide reliable ozone measurements under the harshest conditions.
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Product
Chemiluminescence Method Ozone Analyzer
AQMS-350
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The AQMS-350 is used to detect and evaluate the O3 concentration level of one of the environmental air quality parameters (SO2, NO2, CO, O3, PM2.5, and PM10) based on chemiluminescence technology. This analyzer can measure the concentration of O3 in ppb~ppm level, with strong anti-interference capability, high repeatability, and accuracy.
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Product
Ozone Climatic Test Chamber
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The Ozone Test Chamber provide an effective solution to the testing of products for resistance against ozone degradation in a controlled environment. These test chambers function as static tensile test chambers as well as Rubber Test Chamber and are often used for studying static tensile deformation of various manufactured goods in the presence of ozone. The equipment works by exposing the test samples to uniform concentrations of ozone at constant temperatures and relative humidity in a sealed air environment. Under these conditions, the products undergo the process of corrosion which can be observed in the form of surface cracks and changes in other properties.
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Product
Ionizers / Active Oxygen Module (Ozonizers)
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Ionizer and ozonizer modules utilize high voltages to ionize/ozonize air molecules. They enable air purification, bacteria removal, deodorization, static charge elimination, electrostatic charging and more, and are widely used in air conditioners, air purifiers, refrigerators, washing machines and other products.
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Product
Ozonator Controller
SCI-552
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Teledyne Advanced Pollution Instrumentation
The SCI-552 is a system controller for ozone delivery systems that provides electronic control interfaces for a number of typical system components, including: ozone generators, EV valves, mass flow controllers, back-pressure controllers, Teledyne API 452 ozone sensors, Teledyne API 470 dissolved ozone sensors, and a water chiller.
