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Ozone
Trioxygen
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Gas Measuring Instruments
N Series
Teledyne Advanced Pollution Instrumentation
N Series Gas Measuring Units for SO2 (Sulfur Dioxide), NO, NO2, NOX (Nitrogen Oxide, Nitrogen Dioxide), CO (Carbon Monoxide), CO2 (Carbon Dioxide), O3 (Ozone), True, Direct NO2, NOX, NO, CH4 (Methane), THC (Total Hydrocarbons), and more
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Multi-Channel Ozone Delivery System With In-rack Chiller
SEMOZON® AX8575
The SEMOZON® AX8575 is a fully integrated, high output ozone gas delivery system that can be configured as a multi-channel system delivering ozone for up to 4 channels supporting multiple chambers or multiple tools. It has an optional in-rack chiller for ultra-high concentrations.
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Catalytic Ozone Destructs
CAT-O3 Series
Teledyne Advanced Pollution Instrumentation
The CAT-O3 series of ozone destructs safely decompose high concentrations of ozone gas to sub-ppm levels that are below recommended ozone safety limits. The catalytic method of decomposition uses a metal oxide catalyst to passively convert the ozone to oxygen.
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Single/Multi-Channel Industrial Safety Ozone Monitor
Model 465L
Teledyne Advanced Pollution Instrumentation
The Model 465L UV Photometric Ozone Monitor is an extremely stable analyzer, ideal for critical low-level ppm safety and process applications. Its calibration is NIST traceable and the included pressure and temperature compensation ensure high accuracy under all conditions.
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Test Chambers
Drug test chamber, ozone test chamber, plant grown chamber, salt spray test chamber, sand test chamber, temperature and humidity test chamber, UV test chamber, xenon test chamber
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Dissolved Ozone Monitor
HZ-960
High precision, wide-range dissolved ozone monitor. The repeatability: F.S. +/- 0.2%. Can select the 4 types of measurement range in-line detectors.
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Chemitec Sensors And Analyzers To Monitor Oxidants In Water
Chemitec's S494 series of amperometric probes provide continuous, accurate monitoring of chlorine and other oxidants in clean water applications. A range of sensors assures accurate measurement of oxidation, with sensors optimized for Chlorine (total, organic or inorganic), Chlorine Dioxide, Ozone, Peracetic Acid, Hydrogen Peroxide, Bromine, or Chlorites.
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Stand-alone Ozone Delivery System For Advanced Processes
SEMOZON® AX8585
SEMOZON® AX8585 stand-alone ozone gas delivery system is designed around the AX8410 PRIME ozone generator to provide high flow, high concentration, ultra clean ozone generation and delivery. This fully configurable product line is designed to meet the ever changing needs of the semiconductor industry. Each SEMOZON AX8585 is a fully integrated, high output ozone gas delivery system intended for use in an increasing number of semiconductor process applications such as ALD, CVD, TEOS/Ozone CVD, photoresist strip, wafer cleaning, contaminant removal, and oxide growth.
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Ozone Test Chamber
EKT-2001OZ-HCSSX
Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Ultra Clean, High Concentration, High Flow Ozone Generator
SEMOZON® AX8415
The SEMOZON® AX8415 is the most innovative and versatile ozone generator developed by MKS. Ultra clean, high concentration, high flow ozone is produced by this generator's novel architecture and patented cell design, converting oxygen to >400 g/Nm3 of high concentration ozone for leading-edge applications in the semiconductor, flat panel display and photovoltaic industries.
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Chemiluminescence 03 Analyzer
Model T265
Teledyne Advanced Pollution Instrumentation
The Model T265 is the only commercially available US EPA Federal Reference Method for Ambient Ozone Monitoring according to the latest US EPA regulatory rules for O3. The instrument uses Chemilumescence with Nitric Oxide (NO) as a reagent, making is safe, stable, and effective for all applications. The NO-CL method for Ozone has several advantages over the conventional UV absorption technology, including the avoidance of positive and commonly found interferrents such as VOCs, fine particulates, Mercury, turpines, ClO2, and others. If these pollutants are present in the atmosphere, it can cause UV absorption analyzers to give an artificially high Ozone measurement. The innovative T265 combines speed of response, sensitivity and stability of our proven nitrogen oxide analyzer, with a simple user interface, to provide reliable ozone measurements under the harshest conditions.
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Laboratory Ozone Test Chamber
CX-150
Shenzhen Chuangxin Instruments Co., Ltd.
Laboratory Ozone Test chamber is widely used to control products quality in measuring quality control; Rubber & Plastics; automobile production; wire and cable; packing materials; instruments and meters; medical equipment; civilian nuclear energy; civil aviation; colleges and universities; research laboratories; inspection arbitration, and technical supervision departments and other rubber products.
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Trace-Level Photometric Ozone Calibrator
Model T703U
Teledyne Advanced Pollution Instrumentation
The Model T703U is a microprocessor controlled ozone calibrator for precision gas analyzers. Expanded ozone audit levels have created a need for precise ozone calibration well below the capabilities of standard calibrators. The Model T703U is designed to meet the requirements of ultra-low ozone production.In addition to a high range with similar performance to the Model T703, the Model T703U has the capability to generate ozone in a low range, or "fractional" mode, for producing ozone levels down to 3 ppb, with exceptional accuracy. Flow rate and lamp intensity are adjusted to deliver a specified ozone concentration by volume. The temperature and pressure compensated photometer, identical to that of the Model T400 ozone analyzer, provides feedback control of the UV lamp intensity, assuring stable ozone output. A nearly unlimited number of calibration sequences may be programmed into the non-volatile memory of the T703U, covering time periods up to a year.
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Ozonated Water Delivery System
LIQUOZON® DI-O3
MKS' LIQUOZON® DI-O3 is a dissolved ozone gas delivery system providing high purity ozone in ultrapure water for Semiconductor and Electronic Thin Film applications like contaminant removal and surface conditioning via wet clean or rinsing methods. The high redox potential of ozone causes rapid conversion back to oxygen making it an environmentally friendly alternative to other chemical processes.
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Dissolved Gas Systems
Dissolved gas in deionized water has been widely adopted in manufacturing processes in Electronics, Semiconductors, Flat Panel Displays and Solar applications. These wet techniques increase manufacturing productivity in particle lift-off and wet clean operations. Dissolved gases such as Ammonia, Carbon Dioxide and Ozone are environmentally friendly alternatives to heavy chemicals like sulfuric acid and peroxide acid solutions. MKS offers a large product line of Dissolved Gas systems that improve wet cleaning operations.
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Climatic Test Chambers
Dongguan Amade Instruments Technology Co., Ltd
Climatic test chambers are also referred as environmental test chambers, which is the general name of various test chambers that simulate the natural climate environment of raining, high temperature, low temperature, constant temperature, illumination, dewing etc, products including constant temperature chamber, constant humidity chamber, ozone aging test chamber, UV accelerated weathering tester, vacuum hot air oven, salt spray chamber, steam aging tester, rain test chamber, dust proof test chamber, ventilation aging chamber, xenon lamp weathering test chamber and so on.
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Air Quality Meters
An indoor air quality meter is used in confined spaces to prevent mold, to monitor CO2 levels, or to detect gas leaks. Whether portable or fixed, handheld or wall mounted, air quality monitoring equipment is essential for ensuring health and safety. At PCE Instruments, you will find air quality monitoring devices that meet various industry standards relating to personal safety and that are used to detect, measure and monitor relative humidity, ambient temperature and / or levels of carbon dioxide (CO2), volatile organic compounds (VOCs), formaldehyde (HCHO), freon and other refrigerants (CFC / HFC), phosphine (PH3), hydrogen sulphide (H2S), carbon monoxide (CO), nitrogen dioxide (NO2), oxygen (O2), ozone (O3) and other flammable, hazardous or toxic gases.
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Ozone Test Chambers
Labodam Ozone Test Chambers are designed to detect the concentration of ozone while requiring low maintenance, having well-built corrosion resistant bodies, and while utilizing noiseless generators.
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Transmitter
5081
The Model 5081 family of transmitters can be used to measure pH, ORP, conductivity (using either contacting or toroidal sensors), resistivity, oxygen (ppm and ppb level), free chlorine, total chlorine, and ozone in a variety of process liquids.
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Ozone Generators & Systems
MKS offers a wide range of ozone generators and modular delivery systems which produce ultra-pure, reliable ozone gas. In the clean semiconductor environment, Ozone reacts with a wide range of precursor gases resulting in the creation of Al2O3, ZrO2, HfO2, and La2O3 metal oxides to enable thin film deposition processes like Atomic Layer Deposition (ALD) and Etch (ALE). MKS’ generator uses Grade 6 gas, enabling the creation of higher film density improving product yield. Photovoltaic and Display manufacturing leverage semiconductor best practices and utilize ozone to create enhanced thin film barriers, improving product performance and reliability.
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Rubber Testing Equipment
Dongguan Amade Instruments Technology Co., Ltd
Rubber testing equipment are used to test the physical properties, chemical properties, thermal properties of uncompounded and compounded rubbers at prescribed conditions to help manufactures or researchers in comprehending the characteristics, updating the formula and improving product quality. Including volatile component, ash content, Mooney viscosity, vulcanization curve, Mooney scorch time, hardness, tensile properties, tearing, the compression performance, impact, friction resistance, fatigue resistance, peel strength, vertical & horizontal combustion, smoke density, limiting oxygen index, the flame spread rate, the surface resistance, surface resistivity, volume resistivity, the breakdown voltage, dielectric strength, dielectric loss, antistatic properties, Aging test (UV, Xenon lamp, carbon arc lamp, ozone) etc.
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Ozone Test
Ozone is an extremely reactive form of oxygen occurring around electrical discharges. It is also present in the atmosphere, but in small quantities. Ozone testing is performed to determine the effect on materials such as rubber, plastics, etc, which are susceptible to ozone-induced degradation.
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PRIME Ultra Clean, Ultra High Concentration, Ultra High Flow Ozone Generator
SEMOZON® AX8410
The SEMOZON® AX8410 PRIME is the initial product offering in MKS' next generation platform of compact, high concentration, high flow, ultra clean ozone generators. It features a newly designed cell and power structure to achieve twice the ozone output of earlier models with a similar footprint.
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Ozone Analyzer
KT-2006B
·Sensor type: electrochemical type·Resolution: 1ppm·Measuring range:4000ppm/40000ppm·Degree of accuracy: ±3%·T80 response time: ≤60 seconds ·R.H:15%~90%,non-condensing·Working temperature: 0 to 45℃·Computer interface: RS232·Power supply: 1.5V x 2AA
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Ozone Test Chamber
EKT-2001OZ-HPSSX
Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Chemiluminescence NO/NO2/NOX Analyzer
Model T200
Teledyne Advanced Pollution Instrumentation
The Model T200 NO/NO2/NOx analyzer uses the proven chemiluminescence detection principle, coupled with state-of-the-art electronics to allow accurate and dependable low level measurements for use as an ambient analyzer or dilution CEMS monitor.A unique AutoZero feature provides superb stability by continuously correcting for zero drift, while advanced Adaptive Filtering allows the analyzer to optimize performance under changing conditions. The Model T200 includes a permeation inlet dryer for ozone generation to provide excellent reliability with no periodic replacement required. A catalytic exhaust ozone scrubber is standard for maximum safety and pump life.
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Ozone Gas Delivery Systems
MKS ozone gas delivery systems provide field-proven, high concentration, ultra-clean ozone generation for advanced thin film applications such as Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), Tetraethyl Orthosilicate (TEOS)/Ozone CVD (HDSACVD), contaminant removal and oxide growth. Gas delivery models have integrated ozone concentration monitoring, flow control, and power distribution. Additional system options include safety monitoring, status indicators and ozone destruction capability.
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Process Ozone Instruments
Teledyne Advanced Pollution Instrumentation
All of our instruments are designed meet the rigorous demands of ambient air quality, stack, or industrial process gas monitoring. Below is a list of a range of Teledyne API process ozone instruments.
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Ozone Concentration Tester
OCT-3 PRO
Do you want to know if you can safely share a room with clients that has just been ozonated? Or maybe you want to compare the efficiency of ozonators? The OCT-3 PRO tester is the solution for you.
