Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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Thin Film Metrology Systems
Gemini Series
The n&k Gemini-TF, Gemini-TF-M and Gemini-FPD are specifically designed for measurements of patterned and unpatterned films on transparent or opaque substrates. These tools are used extensively for solar cell, flat panel and photomask applications. The tools belonging to the Gemini-TF Series are based on unpolarized Reflectance (R) and unpolarized Transmittance (T) measurements, with a 50μm spot size for both R and T. R and T are simultaneously measured to determine film thickness and n and k spectra from 190nm – 1000nm
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High-Speed & High-Precision Alignment for Display Metrology
LMK Position
TechnoTeam Bildverarbeitung GmbH
The LMK Position is a photometric robotic system combining LMK-based machine vision with the high precision and flexible movements of a 6-axis Denso VS industrial robot and, optionally, a JETI specbos spectroradiometer. It allows effective and cost-efficient accompanying measurements during research and development tasks and rapid small-series product testing of all kinds of display systems.
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3D Optical Microscopy
Bruker is the worldwide leader in 3D surface measurement and inspection, offering fast, non-contact analyses for samples ranging in size from microscopic MEMS to entire engine blocks. Our microscopes are the culmination of ten generations of proprietary Wyko® Technology advances that provide the high sensitivity and stability necessary for precision 3D surface measurements in applications and environments that are challenging for other metrology systems.
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Horizontal Calibration Instruments (Lab)
Labconcept Nano
The Labconcept Nano is a new reference in the field of dimensional metrology. It integrates 40 years of knowledge and continuous improvement. It is a remarkable instrument for all measuring tasks that require extremely high accuracy.
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White Light Continuum Generator
JIBE
A powerful coherent light source. Due to its amazing wide spectral band, the white light continuum is being applied in different areas such as optical parametric amplification, optical metrology, optical coherence tomography, materials characterization, etc.
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Metrology System
CCC System
Our versatile and robust Cryogenic-Current-Comparator (CCC) system allows high-quality measurements with a fully computer controlled system.
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Displacement Transducers
Displacement transducers are suitable for direct, accurate measurement of displacements in automatic control and metrology.
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Software
LK Metrology offers the ultimate choice of CMM multi-sensor metrology softwares. The CAMIO software fits all solutions, especially those high-end industries, such as the aerospace industry, point cloud measurements and for offline solutions while the ARCOCAD software suits standard application, manual CMMs and portable measuring arms.
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Dimensional Metrology
Nova offers in-line optical integrated and stand-alone metrology platforms. The metrology product portfolio, combined with our modeling algorithm software, delivers unique measurement capabilities for the most advanced semiconductor technology nodes.
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PHOTO-2000μ Μ-LUX Meter
Hangzhou Everfine Photo-E-Info Co., LTD
The PHOTO-2000μ is designed for low illuminance testing above 10-6lx. Using the international leading low-lux detection technology, the measurement accuracy is high, good stability, often used in metering laboratory, physics laboratory, metrology laboratory and other related scientific research, engineering, product inspection and other occasions.
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Vision Metrology System
NGS 3500Z
This bench top lower cost, yet high performance system is designed for applications where defect detection and precisionmeasurements on wafers and other parts (up to 200 mm) are required. It is well suited for use as a dedicated productiontool or as a versatile process development system. It features a powerful set of automated as well as semi-automaticoptical/ video tools optimized for high accuracy, production throughput, and ease of use.This automated and versatile platform features a standard Nikon/ Olympus bright/ dark field microscope with optionalNomarski, and precise part staging. This system offers significant and unique advantages for dual production/ engineeringuse, and provides the perfect solution when both defect detection and dimensional metrology are required.
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Current Transformers
Excellent measurement technology requires high-quality current transformers. The product portfolio comprises a wide range of current transformers for load currents (operating currents) and residual currents (RCM). Different designs cover a variety of installation situations and metrological requirements, and enable retrofitting. AC/DC sensitive measuring current transformers use a special measurement method to detect both AC and DC currents of different frequencies.
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Inductance Standard
1482 Series
The GenRad 1482 Standard Inductors are the standard of choice in metrology labs. Used today by national metrology institutes and primary standards bodies around the world, these inductors have no peer or equivlent.
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Metrology System
Aspect
Memory density increases with both layer-pair scaling and tier stacking for memory stacks well over 200 pairs. The Aspect metrology system was designed with these future architectures and scaling strategies in mind. Aspect metrology is demonstrating performance superior to X-ray systems across multiple customer devices through a revolutionary infrared optical system providing full profiling capability to enable critical etch and deposition control, with the speed and process coverage that customers require.
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Thermal Warpage and Strain Measurement Tool
PS200S
The TherMoir PS200S is a metrology solution that utilizes the shadow moir measurement technique combined with automated phase-stepping to characterize out-of-plane displacement forsamples up to 150 mm x 200 mm. With time-temperature profiling capability, the TherMoir PS200S captures a complete history of a sample's behavior during a user-defined thermal excursion.
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Single-Phase Meter Test Equipment
ASTEL 1.2 TYPE
ASTeL 1.2 meter test equipment is a fully automatic system that enables simultaneous, multi-position calibration and verification of single-phase electric energy meters. ASTeL 1.2 offers full compatibility with IEC 60736. Thanks to excellent parameters, superior functionality and outstanding flexibility, ASTeL 1.2 is an ideal solution for utility companies, energy meter manufacturers, governmental institutes of metrology, metrological laboratories, and other customers interested in electricity meters testing.
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Atomic Force Microscope
XE-PTR
Park Systems' PTR Series is a fully automatic industrial in-line AFM solution for, but not limited to, automatic Pole Tip Recession measurements on Rowbar-level, individual Slider-level, and HGA-level sliders. With sub-nano scale accuracy, repeatability, and throughput, the PTR Series is the metrology tool of choice for Slider manufacturers to improve their overall production yield.
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kSA ICE
The k-Space Integrated Control for Epitaxy system (ICE) is a modular in situ metrology tool designed for today’s MOCVD and MBE reactors. It combines kSA MOS, kSA BandiT and kSA RateRat Pro patented technologies along with an Emissivity Corrected Pyrometry (ECPR) module. The kSA ICE modular design allows the user to specify which modules will be used in their kSA ICE configuration.
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3D Scanning Software
Software is a comprehensive component to any advanced metrology system. Combined with laptops and portable equipment, 3D scanning and measurement is now possible virtually anywhere. 3D scanner software plays a critical role in every stage from the creation of a concept design to the manufacturing and inspection of prototypes. Below is a look at some of the Laser Scanner Software and 3D Scanner Software providers and platforms we represent and handle.
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Custom Systems
Metrology systems rapidly developed at the aperture, wavelength or configuration specified, without being limited to one manufacturer’s range of products, or the risk and expense of creating an inhouse expert team.
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Programming
You are looking for a LabVIEW-solution for a test problem? LabVIEW is an excellent development environment for all areas of metrology. Here we have extensive experience and can help in your test problems. In the LabVIEW programming language, we develop VIs (Virtual Instruments) that can be integrated easily in TestStand. Using hardware-oriented programming languages such as C# and LabVIEW, we develop integrations of control and measurement components.
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InnovMetric-Polyworks Software
PolyWorks is a powerful industrial 3D metrology software solution.
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Reference Meter
SB1300
Shenzhen Star Instrument Co., Ltd.
The SB1300 three-phase multi-function reference meter incorporates 32-bit floating point DSP, wide-range measuring and embedding industrial PC technologies. This model was the first approved by China National Institute of Metrology. Star Instrument has been granted the first manufacturing license for class 0.02 reference meters. Basic measuring range (phase voltage): 1V~480V, current measuring range: 1mA~120A; wide measuring range (phase voltage): 0.1V~1000V, current measuring range: 0.1mA~200A
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Laser Interferometers
ZYGO laser interferometers support and enable the most demanding metrology applications in industries from semiconductor and lithography to space-borne imaging systems, cutting-edge consumer electronics, defense-related IR and thermal imaging systems and ophthalmics.
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High Precision Angular Position, Calibration and Geometry Inspection
GeoOrdinate
Rotary Precision Instruments UK Ltd
Ultra precise rotary tables intended for fine inspection, metrology and test applications.The GeoOrdinate has been designed specifically for the inspection of large and heavy components and is fully compatible with any shop floor environment whilst maintaining world class accuracies more commonly seen in the standards laboratory.
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High Power Narrow Linewidth Laser
AULLD series
Amonics' high power narrow linewidth laser (AULLD series) is integrated with Redfern Integrated Optics (RIO) PLANEXTM high performance external cavity laser. It features narrow linewidth, low phase noise, ultra low RIN, high output power with exceptionally reliable performance. The turnkey microprocessor controlled benchtop AULLD provides alarms and status indicators. An integrated RS232 or Ethernet computer interface provides easy control, diagnostic functions and data acquisition. It is particularly suitable for commercial fiber optic sensing applications, such as interferometric and Brillouin DTSS sensing systems for oil & gas, security, metrology and smart infrastructure.
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Platform
AXM XM8000 Wafer
The complete solution for operator free, automated X-ray wafer metrology. XM8000 is specifically designed for inline use in clean room environments.
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SPC Software Gauging Software
Solartron Metrology offer three Software packages which offer the user different features at different prices.
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Slip Line Detection System
YIS 200
The YIS and SF Series metrology systems are designed for optical detection of wafer defects such as crystaldislocations, slip and other defects. The YIS-300HM (for 300 mm wafers) and YIS-200HM (for 200 mm wafers) utilizeMakyoh optics technology (Magic Mirror) and integrated robotic wafer handler provided by Hologenix.
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E-beam Metrology And Inspection
Our HMI e-beam solutions help to locate and analyze individual chip defects amid millions of printed patterns.
