Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
-
Product
Automatic Online Flatness and Surface Appearance System
UltraSort200
-
The UltraSort continues our 25 year tradition of providing metrology solutions to semiconductor wafer manufacturers. Designed for volume wafer production, this automated system offers superior performance in rapid, repeatable, accurate, noncontact qualification of silicon and alternative substrate wafers.
-
Product
3D Scanning System
CyberGage360
-
Unprecedented combination of speed, accuracy and one-button simplicity for non-contact automated 3D scanning inspection.CyberGage360 dramatically Speeds Up Quality Assurance of Incoming Parts Inspection & In-Process Inspection of components on the manufacturing floor; Lowers Cost of Quality & Speeds Up Product Time-to-Market. Designed for use in general purpose metrology, the CyberGage360 has a range of potential industrial applications from automotive to aerospace to consumer electronics, where high accuracy and high speed throughput are important.
-
Product
Metrology
-
Rosenberger Hochfrequenztechnik GmbH & Co. KG
Network analyzers are used to measure so-called scatter parameters (S-parameters). These describe the behaviour of electrical components with the help of wave magnitudes. Whether simple cables, filters, amplifiers or complex subsystems, the following applies to all these components: Different loads can have unseen effects on the measured values over time.
-
Product
Metrology/SEM
-
Our SEM products use scanning electron microscope technology to measure and review tiny surface structures such as photomask etching and circuitry on wafers with high precision and stability.
-
Product
EFEM Platform
Equipment Front End Module (EFEM) Platform
Our EFEM Platform can act as a standard EFEM, or can be customized to suit your application’s cleanliness, handling technique, throughput, and form-factor requirements. From design to manufacturing, we offer units in varying complexity and precision and can integrate the needed hardware, software, vision, optics design, sub-micron metrology, environmental control and materials handling to fit your needs from single units to 4-wide.
-
Product
Adapters and Connectors
-
A broad range of adapters and connectors designed for long life, exceptional repeatability, and legendary reliability. Metrology grade, instrument grade, and general purpose grade adapters are available in frequencies up to 110GHz.
-
Product
CMOS USB3 Cameras
CELERA One Series
-
CELERA One camera series provide the same excellence in quality, flexibility and performances of CELERA cameras, with the only exception of a single USB3 interface, while keeping the original extremely reduced dimensions and rugged design that make CELERA One cameras suitable for most applications: automated optical inspection, high performance sorting systems, industrial metrology, microscopy, medical diagnostics and machine vision.
-
Product
Multi-Surface Profiler
Tropel® FlatMaster® MSP
-
The Tropel® FlatMaster® MSP (Multi-Surface Profiler) is a frequency stepping interferometer that provides fast and accurate metrology for semiconductor wafers up to 300mm in diameter. In seconds up to 3 million data points are collected with sub-micron accuracy enabling total thickness and flatness characterization over the entire surface.
-
Product
Scatterometers/ Thin Film Metrology Systems
LittleFoot Series
-
The n&k LittleFoot-CD, and LittleFoot-CD450 are DUV-Vis-NIR scatterometers/thin film metrology systems, based on polarized reflectance measurements (Rs and Rp) from 190nm to 1000nm, with microspot technology. The systems in the LittleFoot-CD Series determine thickness, n and k spectra from 190nm-1000nm of thin films, as well as depths, CDs, and profiles of trenches and contact holes.
-
Product
2D/3D Wafer Metrology System
7980
-
Chroma 7980 provides accurate and reliable profile information. 7980 adopts new BLiS technology and specially designed platform to achieve 2D/3D nanoscale measurement.
-
Product
3MS Automatic Measuring System
-
With the accelerating of modern meteorology, various ground automatic weather stations have been widely applied. As a result, the need for metrological verification is soaring. However, the existing metrological verification standards, equipment and methods are barely enough to meet the current growing requirements. So systemizing metrological verification management and automating the detection will be the vital factor to solve the problem.
-
Product
Reticle Manufacturing
-
An error-free reticle (also known as a photomask or mask) represents a critical element in achieving high semiconductor device yields, since reticle defects or pattern placement errors can be replicated in many die on production wafers. Reticles are built upon blanks: substrates of quartz deposited with absorber films. KLA’s portfolio of reticle inspection, metrology and data analytics systems help blank, reticle and IC manufacturers identify reticle defects and pattern placement errors, thereby reducing yield risk.
-
Product
Monolithic Laser Combiners & Precision Optics
-
For more than 40 years, our vertically integrated in-house production teams have relied on collaborative interdisciplinary processes to drive product performance and manufacturability. And we back up everything we do with industry-leading metrology to ensure that the building blocks of our technology – fabrication, coating, and assembly – permanently align to your exacting specifications to deliver consistent, shipment-to-shipment product performance, even in the most demanding environments.
-
Product
Vision Measurement Technologies
-
Some manufacturers of metrology systems utilize one single technology to measure a wide range of components despite the different form factor of each of the components, which can drastically affect the quality of the measurement.
-
Product
Optical 3D Measuring Systems & Devices For Your Quality Assurance
-
As a manufacturer of optical industrial metrology, we offer a broad portfolio of optical 3D measuring systems & devices to support companies in various industries with precise quality assurance in production. Based on Focus Variation technology, our measuring systems not only enable surface roughness measurement, but also the detection of micro-geometries, shapes and structures.
-
Product
Software
-
Advanced, specialized programs designed for wavefront sensing, optical metrology, and adaptive optics control.
-
Product
Thermistor Power Meter
N432A
-
Keysight N432A is the replacement for Keysight's legacy 432A analog thermistor power meter. The single-channel, average RF power meter operates with the Keysight 8478B and 478A thermistor mounts. The N432A-and-thermistor-mount pair is ideal for applications that require high measurement accuracy, particularly in metrology and calibration laboratory environments. The enhanced thermistor power meter comes with a digital color LCD display, and user-friendly front panel interface. Its built-in calibration factor table provides a more convenient and accurate method of storing calibration factors as compared to the old knob-turning approach of the 432A. The N432A is LXI compliant, and programmable via GPIB, USB and LAN.
-
Product
Surface Analysis
Dimension AFP
-
The Dimension AFP is the world's only fab-based metrology tool specifically designed for both CMP profiling and etch depth metrology for current and advanced technology nodes. The system combines the superb resolution of an AFM with the long-scan capability of an atomic force profiler tomonitor etch depth and dishing and erosion on submicron features with unsurpassed repeatability.
-
Product
Dimensional Metrology
Stand-Alone Metrology Family
-
Nova’s stand-alone metrology platforms are utilized to characterize critical dimensions such as width, shape and profile with high precision and accuracy and are used in multiple areas of the fab such as photolithography, etch, CMP and deposition in the most advanced technology nodes, across all semiconductor leading customers.
-
Product
Wafer Inspection Products
-
Sonix provides manual and automated wafer inspection and metrology systems for wafers ranging from 100mm to 300mm, with extensive analysis capabilities at both the wafer and device level. These industry-leading automated wafer inspection systems are used by the world’s top manufacturers to ensure quality from development through production.
-
Product
Thin Film Metrology Systems
Gemini Series
-
The n&k Gemini-TF, Gemini-TF-M and Gemini-FPD are specifically designed for measurements of patterned and unpatterned films on transparent or opaque substrates. These tools are used extensively for solar cell, flat panel and photomask applications. The tools belonging to the Gemini-TF Series are based on unpolarized Reflectance (R) and unpolarized Transmittance (T) measurements, with a 50μm spot size for both R and T. R and T are simultaneously measured to determine film thickness and n and k spectra from 190nm – 1000nm
-
Product
Adapter, 2.4 mm (m) to 2.4 mm (f), DC to 50 GHz
11900C
-
The Keysight 11900C is a metrology grade, 2.4 mm male to 2.4 mm female adapter with dc to 50 GHz operation.
-
Product
Automated Semiconductor Wafer Optical Inspection and Metrology
SITEview Software
-
Microtronic SITEview Software is designed from the end-user operator’s perspective and is easy to use, fully featured, and modular. Applications include visual wafer inspection, OCR sorting, wafer defect review, second optical inspection, image storage and retrieval, laser marking, microscope interface, and GEM/SECS II communication and seamlessly integrates with EAGLEview, MicroINSPECT and MicroSORT.
-
Product
Failure Analysis And Magnetic Imaging Services
-
Micro Magnetics offers failure analysis services on a contractual basis. We maintain two current density metrology systems at our headquarters in Fall River and can produce maps of current flow in a wide variety of ICs and packages, usually with initial results delivered within 48 hours. Our engineers will work closely with you to understand and interpret the results in order to determine the root cause of the failure.
-
Product
Dimensional Metrology
-
Nova offers in-line optical integrated and stand-alone metrology platforms. The metrology product portfolio, combined with our modeling algorithm software, delivers unique measurement capabilities for the most advanced semiconductor technology nodes.
-
Product
Slide Calipers
-
We recognize that reliable operation and dependable accuracy are essential to your quality and manufacturing operations. As part of our commitment to quality, we have established first generation NIST traceable documentation for all calibration artifacts and standards. Our metrology professionals are available to assist you with whatever you need to keep your system on the job.
-
Product
Micro-spot Spectroscopic Reflectometry
FilmTek 2000M
-
Scientific Computing International
Micro-spot size benchtop metrology system engineered for unparalleled versatility and high performance, meeting the needs of patterned film applications requiring a very small spot size. Allows for measurement spot sizes as small as 2µm, and delivers reliable measurement of both thin and thick films.
-
Product
DC Current Shunts
-
DC current shunts / standards are true 4-terminal devices that precisely measure DC currents from 10 A to 10,000 A. They use special alloys in the resistive elements which are supported on an insulating base for mechanical stability. The 9230A includes special features to reduce the effects of power dissipation and associated self heating errors. These shunts are designed to operate in air at full rated current. These are the best performing, and most widely used, DC metrology shunts in the world.
-
Product
CMM Styli
-
Q-Mark manufactures styli and accessories for the metrology and machine tool industries.
-
Product
Potable Coordinate Measuring Machines
Romer
-
A first in the world of portable measuring arms: The ROMER Absolute Arm features absolute encoders and is therefore the first measuring arm which does not require referencing before measurement. When the arm is turned on, it’s ready to go.Quality control, inspection, on-machine verification, reverse engineering, virtual assembly or 3D modelling. Wherever these needs arise, you will find the ROMER Absolute Arm. Much more than just a metrology tool, its value lies in its versatility.Portability, stability, light weight and high-performance laser scanners make the ROMER Absolute Arm an all-purpose 3D measurement, analysis and digitising tool that can be used by anyone, anywhere and with minimum training.Unlike many metrology devices, the ROMER Absolute Arm does not require warm-up time or initialization, thanks to a stable carbon fiber structure and industry leading Absolute encoders. Simply take the measuring arm to the part, switch it on and start measuring.
