Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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Thermal Warpage Measurement Tool
PS600S
The TherMoir PS600S is a metrology solution that utilizes the shadow moir measurement technique combined with automated phase-stepping to characterize out-of-plane displacement for samples up to 600 mm x 600 mm. With time-temperature profiling capability, the TherMoir PS600S captures a complete history of a sample's behavior during a user-defined thermal excursion.
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Solar Photovoltaic
Scientific Computing International
Automated metrology system designed for rapid, reliable, and accurate characterization of nearly any unpatterned thin film.
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Full 3D Inline Metrological & Imaging AOI
Metrological Full 3D AOI is achieved by measuring all 3 dimensions (X, Y and Height) to detect every measurable solder and component defect pre-reflow and/or post reflow soldering.
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Packaging Manufacturing
KLA’s extensive portfolio of packaging solutions accelerates the manufacturing process for outsourced semiconductor assembly and test (OSAT) providers, device manufacturers and foundries for a wide range of packaging applications. Innovations in advanced packaging, such as 2.5D/3D IC integration using through silicon vias (TSVs), wafer-level chip scale packaging (WLCSP), fan-out wafer-level packaging (FOWLP) and heterogeneous integration as well as a wide range of IC substrates create new and evolving process requirements. KLA offers systems for packaging inspection, metrology, die sorting and data analytics focused on meeting quality standards and increasing yield before and after singulation. SPTS provides a broad range of etch and deposition process solutions for advanced packaging applications. Orbotech offers a portfolio of technologies that includes automated optical inspection (AOI), automated optical shaping (AOS), direct imaging (DI), UV laser drilling, inkjet/additive printing and software solutions to ensure manufacture of the highest quality of IC substrates.
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Chip Manufacturing
KLA’s advanced process control and process enabling solutions support integrated circuit manufacturing. Using KLA’s comprehensive portfolio of defect inspection, review, metrology, patterning simulation, in situ process monitoring and data analytics systems, IC manufacturers can manage yield and reliability throughout the chip fabrication process - from research and development to final volume production. SPTS provides deposition process solutions for insulating materials and conducting metals that cover a range of chip manufacturing process steps. IC manufacturers use KLA's array of products and solutions to help accelerate their development and production ramp cycles, to achieve higher semiconductor die yield and improved IC quality, and to improve overall profitability in the IC manufacturing process.
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CT PT Tester
HTFA-103 / 335
Wuhan Huatian Electric Power Automation Co., Ltd.
Used for automatic testing of protective and metrological CT/PT.
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SF6 Decomposition Products Detector
JH4000A-4
Xiamen Jiahua Electrical Technology Co.,Ltd
JH4000A-4 SF6 Electrical Equipment Decomposition Products Detector is a high precision, intelligent and portable device, able to make judgment rapidly and correctly based on the content of main decomposition products of insulation materials inside the SF6 electrical equipment like SF6 circuit breaker, instrument transformer, GIS and transformer. It detects SO2+SOF2, H2S, CO and HF. It is reliable, accurate and stable. Inspected by authorities such as the National Institute of Metrology, the device, having excellent performance, complies with relevant international and national standards. It is a product recommended for use by the State Power Grid Company. Decomposition products detection provides reliable evidence for the internal fault diagnosis and it is an effective measure for preventive and corrective maintenance.
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Adapter, 2.4 mm (m) to APC-7, DC to 18 GHz
11902A
The Keysight 11902A is a 2.4 mm male to APC-7, metrology grade adapter with dc to 18 GHz operation.
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2D/3D Wafer Metrology System
7980
Chroma 7980 provides accurate and reliable profile information. 7980 adopts new BLiS technology and specially designed platform to achieve 2D/3D nanoscale measurement.
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Pulser Sensor, Sent Signal, CNEX/ATEX Certificates
SK-S
Beijing SANKI Petroleum Technology Co., Ltd.
*convert the mechanical transmission signal of flow meter into electrical pulse signal* send the electrical pulse signal to main-board to realize the metrology function of the flow meter
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CT PT Tester
HTFA-105 / 337
Wuhan Huatian Electric Power Automation Co., Ltd.
Used for automatic testing of protective and metrological CT/PT.
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CT PT Tester
HTFA-105A / 339
Wuhan Huatian Electric Power Automation Co., Ltd.
Used for automatic testing of protective and metrological CT/PT.
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Advanced Stand-Alone AFM
SmartSPM
The SmartSPM Scanning Probe Microscope is the first 100% automated system that offers its cutting-edge technology of ultra-fast, metrological and high-resolution measurements for the most advanced materials research at the nanoscale in all AFM and STM modes. With the SmartSPM zooming in from large up to 100 µm overview scans down to atomic resolution has become a reality. Its design has been specially developed to be capable of being seamlessly integrated with optical spectroscopies (SNOM, Raman, Photoluminescence and TERS/SERS techniques).
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Surface Analysis
Dimension AFP
The Dimension AFP is the world's only fab-based metrology tool specifically designed for both CMP profiling and etch depth metrology for current and advanced technology nodes. The system combines the superb resolution of an AFM with the long-scan capability of an atomic force profiler tomonitor etch depth and dishing and erosion on submicron features with unsurpassed repeatability.
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Optical Thin-Film Metrology for Advanced Thin Films
FilmTek 6000 PAR-SE
Scientific Computing International
Production-proven metrology system for film thickness, refractive index and stress measurement for a broad range of film layers at the 1x nm design node and beyond. Accommodates 200 or 300 mm wafer metrology. Combines spectroscopic ellipsometry and DUV multi-angle polarized reflectometry with a wide spectral range to meet the challenging demands associated with multi-patterning and other leading-edge device fabrication techniques.
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Panels
Designed mainly for Fanout Panel-Level-Package (FO-PLP) applications, Camtek’s Golden Eagle is used for the inspection and metrology of standard panel sizes, up to 650mm x 650mm. The Golden Eagle addresses the challenges of FOWLP while providing a robust system that addresses the most stringent, high-volume manufacturing requirements.
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CMM Upgrades
Upgrade your existing CMM, experience the power of Verisurf on all of your measuring devices, and eliminate the inconvenience of maintaining different metrology software (and skill sets) for different systems.
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Reverse Engineering Services
Whether for global manufacturers or small custom shops, API’s measurement expertise, combined with advanced metrology equipment, can execute convenient and fast reverse engineering projects. Our Laser scanning services can create data from an existing part or compare captured data to a CAD model. Reverse engineering services include scan as-built parts to creation of a 3D digital point cloud and CAD Model.
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STRUCTURED LIGHT PROJECTORS
LUMAXIS
Lumaxis strives to become an industry leading supplier of state-of-the-art-projection engines for 3D Metrology. Our mission is to accelerate the industry’s transition to the most advanced and economically compelling structured light projectors available. Please take a moment to tell us your requirements in the form below. We understand this is a very price-sensitive industry. Our ability to deliver projection engines at an aggressive price depends largely on quantity and the capability of the projector you’re requesting. Thank you for taking time to provide this information.
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Adapter, 2.4 mm (f) to APC-7, DC to 18 GHz
11902B
The Keysight 11902B is a metrology grade, 2.4 mm female to APC-7 adapter with dc to 18 GHz operation.
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Advanced Metrology System
AMS Series
Precision systems for accurate measurement and quality control in semiconductor manufacturing.
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TE-Metrology
HIGHVOLT Prüftechnik Dresden GmbH
The TE measurement complements the high voltage test and is part of the routine and type testing of numerous electrical devices. It is one of the most important non-destructive methods for detecting faults in electrical installations. The breakdown of an insulating material usually occurs at an internal weak point, which usually already shows a partial discharge activity in advance. For this reason, measuring partial discharges can help prevent costly damage. The TE measurement is thus used for quality testing and diagnosis in the factory as well as during on-site testing of cables, GIS, power transformers and transducers or rotating machinery and their components
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Optical Metrology
Complex measurements can be performed quickly and easily with optical measuring solutions from ZEISS. With a high degree of automation and state-of-the-art sensors, they reduce operating errors and guarantee high measuring accuracy.
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Thermistor Power Meter
N432A
Keysight N432A is the replacement for Keysight's legacy 432A analog thermistor power meter. The single-channel, average RF power meter operates with the Keysight 8478B and 478A thermistor mounts. The N432A-and-thermistor-mount pair is ideal for applications that require high measurement accuracy, particularly in metrology and calibration laboratory environments. The enhanced thermistor power meter comes with a digital color LCD display, and user-friendly front panel interface. Its built-in calibration factor table provides a more convenient and accurate method of storing calibration factors as compared to the old knob-turning approach of the 432A. The N432A is LXI compliant, and programmable via GPIB, USB and LAN.
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Calibration And Measurement
Ectron has a long tradition dating back to 1964 in being the industry leader in supplying super high precision, highly reliable and accurate Metrology, Simulators/Calibrators products.
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Photovoltaic/Solar Metrology System
Multi-channel thickness, TTV and bow measurement module for in-process monitoring of solar/photovoltaic wafers and other materials.
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Calibration
Get the precision calibration tools you need to maintain the accuracy of your process, electrical, temperature, pressure, and flow measuring instruments and equipment. In addition, our in-house metrology lab will precalibrate an instrument at time of order or recalibrate equipment already owned. Our NIST-traceable calibration services and repairs help you meet your quality, regulatory, and compliance needs.
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SlipFinder
YIS and SF Series
The YIS and SF Series metrology systems are designed for optical detection of wafer defects such as crystaldislocations, slip and other defects. The YIS-300HM (for 300 mm wafers) and YIS-200HM (for 200 mm wafers) utilizeMakyoh optics technology (Magic Mirror) and integrated robotic wafer handler provided by Hologenix.The SF300M and SF300N systems offer a low cost functionally equivalent alternative to the YIS series.
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3MS Automatic Measuring System
With the accelerating of modern meteorology, various ground automatic weather stations have been widely applied. As a result, the need for metrological verification is soaring. However, the existing metrological verification standards, equipment and methods are barely enough to meet the current growing requirements. So systemizing metrological verification management and automating the detection will be the vital factor to solve the problem.
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Advanced Packaging & TSV
FilmTek 2000M TSV
Scientific Computing International
Advanced semiconductor packaging metrology system providing an unmatched combination of speed, accuracy, and precision for high-throughput measurements of resist thickness, through silicon vias (TSVs), Cu-pillars, bumps, redistribution layer (RDL) and other packaging processes.
