Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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Product
microRSP
M200
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The window of acceptable sheet resistance is shrinking with each technology node resulting in increasingly more rigorous standards for scale and accuracy of metrology tools. The shortcomings of traditional types of 4 point probes are becoming more and more evident. By developing the microRSP-M200, a unique tool for measuring the sheet resistance of conducting films, hereunder ultra shallow junctions (USJ’s), CAPRES A/S has responded to the growing need for reliable sheet resistance measurements on micro scale.
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Product
Optical Gaging Products
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Quality Vision International Inc.
OGP® pioneered multisensor measurement with vision, touch probe and laser sensors. For over 75 years, OGP has consistently led with a succession of innovative systems and sensors to tackle the most difficult measurement challenges, especially as it pertains to the medical industry. Multisensor metrology is a preferred quality control technology for manufacturers to develop, maintain, and improve the quality of medical devices.
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Compact Horizontal Gage
1302
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The Adcole Model 1302 represents a significant advancement in precision metrology and is an essential part of the production process for sliding cam and shifting camshaft components. The shaft gage features two opposing measuring heads to maximize speed and achieve faster cycle time, while still delivering the sub-micron accuracy and repeatability that have defined Adcole gages as the world standard in cam/crank metrology.
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Product
Manufactoring
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Applied Automation Technologies, Inc
CAPPS is one of the first CAD based online CMM software. AAT developed CAPPS to be an upwardly mobile metrology software with a strong graphics engine, complete CAD capability, a powerful programming language with DMIS and tree view structure as well as a flexible reporting environment. With over 20 years of evolution, CAPPS has been the leader in CAD based measurement software. AAT offers several products derived from the CAPPS system serving specific needs of customers.CAPPS is available in 3 separate versions. Each designed to meet the particular needs of its users:
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Product
Scatterometer with Thin Film Measurement Capabilities
OptiPrime-X Series
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The n&k OptiPrime-X series are automated metrology systems used to fully characterize and monitor Thin Film and OCD applications for both current and next generation IC processes.
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Product
In-Line Spectroscopic Ellipsometer for Web Coater and Roll to Roll Systems
UVISEL
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The UVISEL Spectroscopic Phase Modulated Ellipsometer is a turn-key thin film metrology instrument for in-line measurement of thin film thickness and optical properties. It features rapid measurement capability with data acquired every 50 ms for powerful control of thin film uniformity across the entire web.The design of the UVISEL ellipsometric heads allows simple integration into roll-to-roll systems, while the software provides advanced communication capabilities suited to roll-to-roll production.
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Product
Optical Thin-Film Metrology for Advanced Thin Films
FilmTek 6000 PAR-SE
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Scientific Computing International
Production-proven metrology system for film thickness, refractive index and stress measurement for a broad range of film layers at the 1x nm design node and beyond. Accommodates 200 or 300 mm wafer metrology. Combines spectroscopic ellipsometry and DUV multi-angle polarized reflectometry with a wide spectral range to meet the challenging demands associated with multi-patterning and other leading-edge device fabrication techniques.
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Metrology Software
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ZYGO has been developing metrology software for decades – our commitment to helping our customers measure confidently, and the heart of our quality guarantee. Our original instrument software, MetroPro, established itself as a gold standard in the optical metrology world. Now, its successor Mx continues that legacy: trusted, easy to use, and heavily customizable.
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Product
Dimensional Metrology
Integrated Metrology Family
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Nova is the market leader in the space of integrated metrology platforms with multiple generations of products. Our integrated metrology platforms enable advanced process control (APC) to monitor and control wafer to wafer variations of complex high-end CMP and Etch applications with high productivity and reliability required for the most advanced logic and memory technology nodes.
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Product
Laser Interferometers
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ZYGO laser interferometers support and enable the most demanding metrology applications in industries from semiconductor and lithography to space-borne imaging systems, cutting-edge consumer electronics, defense-related IR and thermal imaging systems and ophthalmics.
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High Power Narrow Linewidth Laser
AULLD series
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Amonics' high power narrow linewidth laser (AULLD series) is integrated with Redfern Integrated Optics (RIO) PLANEXTM high performance external cavity laser. It features narrow linewidth, low phase noise, ultra low RIN, high output power with exceptionally reliable performance. The turnkey microprocessor controlled benchtop AULLD provides alarms and status indicators. An integrated RS232 or Ethernet computer interface provides easy control, diagnostic functions and data acquisition. It is particularly suitable for commercial fiber optic sensing applications, such as interferometric and Brillouin DTSS sensing systems for oil & gas, security, metrology and smart infrastructure.
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Product
Automated Surface Inspection for Glossy Components
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Flawlessly glossy surfaces are among the most important quality features of many premium products. The smallest surface defects immediately have a degrading effect on the product. The result: disappointed end customers or buyers. At the same time, reflective surfaces are often very sensitive and a challenge for optical metrology. A manual inspection is tedious, expensive, and ultimately always governed by subjective decision criteria. During production, faulty painting or coating processes can cause high scrap rates. Defects that are not detected even during the final inspection can lead to expensive complaints and, in the worst case, to the loss of the customer. Only an efficient, automated surface inspection achieves the highest quality at acceptable costs.
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Product
Infrared Microscope
DDR200 & DDR300
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The McBain DDR200 and DDR300 for 200mm and 300mm wafer defect detection and review are unmatched in value and features in this special application and price category. The systems offer significant and unique advantages for both production and engineering use, and provide an ideal solution when both defect detection and dimensional metrology are required.
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Product
Infrared Microscope
DDR200/300 NIR
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The McBain DDR200 NIR (for 200mm) and DDR300 NIR (for 300mm) provide high-speed defect detection and precision measurement on wafers and other parts. These cost-efficient systems offer unique advantages for both production and process development use, providing an optimum near-infrared (900-1700nm) solution when both subsurface defect detection and dimensional metrology are required.
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Product
Gauges & Calibrators
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Ralston Instruments' gauges and calibrators are born from decades of experience working with technicians, project managers and facilities teams responsible for maintaining metrology instruments.
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Product
Compound Semi | MEMS | HDD Manufacturing
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KLA has a comprehensive portfolio of inspection, metrology, and data analytics systems to support power devices, RF communications, LED, photonics, MEMS, CPV solar and display manufacturing. High brightness LEDs are becoming commonly used in solid-state lighting and automotive applications, and LED device makers are targeting aggressive cost and performance improvements, requiring more emphasis on improved process control and yield. Similarly, leading power device manufacturers are targeting faster development and ramp times, high product yields and lower device costs, and are implementing solutions for characterizing yield-limiting defects and processes. KLA's inspection, metrology and data analytics systems help these manufacturers control their processes and increase yield.
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Product
High Performance Polyphase Energy Metering AFE w/ Power Quality Analysis
ADE9000
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The ADE9000 is a highly accurate, fully integrated energy-metering device. Interfacing with both current transformer (CT) and Rogowski coil sensors, the ADE9000 enables users to develop a three-phase metrology platform, which achieves high performance for Class 1 through Class 0.2 meters. Power quality features enable advanced meter designs with fast rms measurements and power quality level monitoring for EN50160 compliance. The ADE9000 integrates seven high performances ADC’s, a flexible DSP core. An integrated high-end reference ensures low drift over temperature with a combined drift of less than ±25 ppm/°C max for the whole channel including PGA and ADC.
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Product
SF6 Decomposition Products Detector
JH4000A-4
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Xiamen Jiahua Electrical Technology Co.,Ltd
JH4000A-4 SF6 Electrical Equipment Decomposition Products Detector is a high precision, intelligent and portable device, able to make judgment rapidly and correctly based on the content of main decomposition products of insulation materials inside the SF6 electrical equipment like SF6 circuit breaker, instrument transformer, GIS and transformer. It detects SO2+SOF2, H2S, CO and HF. It is reliable, accurate and stable. Inspected by authorities such as the National Institute of Metrology, the device, having excellent performance, complies with relevant international and national standards. It is a product recommended for use by the State Power Grid Company. Decomposition products detection provides reliable evidence for the internal fault diagnosis and it is an effective measure for preventive and corrective maintenance.
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Mid-end
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Growth in the advanced packaging market and the challenges raised by the various packaging types requires the highest level of inspection and metrology, ensuring high yields of each die as well as of the whole package.
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Product
Dimensional Metrology
Fleet Connectivity & Control Family
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Nova’s Fleet Management and Performance Monitoring Center simplify the management and enhance the productivity of Nova tools in the fab. The platform’s ability to process and analyze large amounts of fleet and metrology data using advanced data analytic tools provides our customers with intelligent and predictive insights on tool performance and process trends.
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Horizontal Arm CMMs
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As a system provider, ZEISS offers just the solutions for the changing conditions of day-to-day measuring tasks with impressive accuracy, effectiveness, and above all, dependability. From the first consultation on the installation, to the maintenance of your measuring machines, ZEISS takes charge of your metrology. You get all the services and products from the same partner – and all optimally matched to each other.
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Product
Stylus Profilometers
Tencor™
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KLA Instruments™ Alpha-Step®, Tencor P- and HRP®-series stylus profilometers deliver high-precision, 2D and 3D surface metrology, measuring step height, surface roughness, bow and stress with industry-leading stability and reliability for your R&D and production requirements.
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Product
Universal 3D Measurement Software
Metrolog
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Get a real performance accelerator for your 3D measuring devices and more.Not only does Metrolog X4 architecture benefit from current computer and OS technologies significantly increasing the performances and metrology software throughput, but it also simplifies your day-to-day measurement workflow.
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Product
Laser Scanning Systems
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QFP markets manually handled and optically tracked 3D laser scanners that set new standards in the metrology measurement industry. The products are characterized by exceptional performance, ease of use and cost-effectiveness and are the perfect solution for the metrology room as well as for the production line, stand-alone or automated.
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Product
Chip Manufacturing
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KLA’s advanced process control and process enabling solutions support integrated circuit manufacturing. Using KLA’s comprehensive portfolio of defect inspection, review, metrology, patterning simulation, in situ process monitoring and data analytics systems, IC manufacturers can manage yield and reliability throughout the chip fabrication process - from research and development to final volume production. SPTS provides deposition process solutions for insulating materials and conducting metals that cover a range of chip manufacturing process steps. IC manufacturers use KLA's array of products and solutions to help accelerate their development and production ramp cycles, to achieve higher semiconductor die yield and improved IC quality, and to improve overall profitability in the IC manufacturing process.
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Product
Ambient Air Quality Monitoring System
AQMS
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AQMS, the doctor for "Human Health"An Air Quality Monitoring Station (AQMS) is a system that measures metrological parameters such as wind speed, wind direction, rainfall, radiation, temperature, barometric pressure and ambient parameters. The AQMS also integrates a series of ambient analyzers to monitor the concentration of air pollutants (such as SO2, NOx, CO, O3, THC, PM, etc.), continuously. HORIBA also provides mobile monitoring stations that can be used to monitor ambient conditions at multiple sites.
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Product
High Precision Angular Positioning, Calibration and Geometry Inspection
LabStandard COMPACT
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Rotary Precision Instruments UK Ltd
Designed for horizontal or vertical applications with a high accuracy angular encoder ensures sensitivity and fine positioning for metrology and precision testing.
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Product
Rotary Positioning
Direct Drive Theta
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Our Direct Drive Theta (DDT) rotary stage units feature a compact mechanical design that makes them easy to integrate into metrology systems and other machines that need precision positioning.
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Product
Platform
AXM XM8000 Wafer
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The complete solution for operator free, automated X-ray wafer metrology. XM8000 is specifically designed for inline use in clean room environments.
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Product
Portable optical DO meter
ARO-PR
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The Portable optical DO meter makes use of the fast-response optical DO sensor RINKO, maintaining its high-speed response performance (99% response < 7sec). The meter probe is equipped with a temperature sensor close to the sensing foil, and the measurements are made by simply inserting the probe into a DO sample bottle (the calibration is carried out using the National Metrology Institute of Japan (NMIJ) certified traceable gases standards). Differently from galvanic electrode sensors, the instrument does not require water sample stirring or fixing reagents, since there is no oxygen consumption. Thus, the required time to estimate dissolved oxygen is considerably reduced. The display unit shows the output instantaneously, and you can check the measured values in real time.
