Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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Make Your 3D Control Smarter
VALUE ADDED SOLUTIONS
At Metrologic Group, we always seek to be a problem-solver for industrial manufacturers and quality assurance professionals. That is why, we continuously develop improvements of our software and complementary solutions to respond or even outreach customer expectations.
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Xytronic Single-Phase Reference Standard +/- 0.04%, +/- 0.02%, +/- 0.01%
RADIAN RX-20, RX-21 and RX-23
Radian Research is committed to providing our customers with leading innovative and technologically superior products, while maintaining metrology capability in power and energy measurement that is surpassed by none. Our engineers drew on the expertise and knowledge we acquired for our industry-leading legacy RM (Metronic) and RD (Dytronic) reference standards to develop the RX (Xytronic), the ultimate in power and energy measurement technology perfection.
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Metrology System
IVS
The IVS 220 system is the latest generation in the IVS series and has been designed for ultimate precision, TIS (tool induced shift) and throughput on 200mm wafers. The cornerstone of the system’s reliability and stability is its mean time between failure (MTBF) of 2,100 hours. The IVS 280 provides the same capability in a package designed for overhead track handling with full E84 GEM300 capability.
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CMM Styli
Q-Mark manufactures styli and accessories for the metrology and machine tool industries.
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Wafer Inspection Products
Sonix provides manual and automated wafer inspection and metrology systems for wafers ranging from 100mm to 300mm, with extensive analysis capabilities at both the wafer and device level. These industry-leading automated wafer inspection systems are used by the world’s top manufacturers to ensure quality from development through production.
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In-Line Spectroscopic Ellipsometer for Web Coater and Roll to Roll Systems
UVISEL
The UVISEL Spectroscopic Phase Modulated Ellipsometer is a turn-key thin film metrology instrument for in-line measurement of thin film thickness and optical properties. It features rapid measurement capability with data acquired every 50 ms for powerful control of thin film uniformity across the entire web.The design of the UVISEL ellipsometric heads allows simple integration into roll-to-roll systems, while the software provides advanced communication capabilities suited to roll-to-roll production.
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Analytical Software for Microscopy
SPIP
SPIP™ or Scanning Probe Image Processor - is an advanced software package for processing and analyzing microscopic images at nano- and microscale. It has been developed as a proprietary software by Image Metrology and is unique in the microscopy and microscale research market. With the high level of usable features, SPIP provides industrial and academic researchers with an advanced toolkit for working with microscope images, incl. extracting data from most microscopy file types, cleaning and enhancing data, analyzing measurements, visualizing and reporting analysis results. The software is used for research and innovation in a variety of industries such as pharmaceutical, cosmetics, semiconductors, hard disk manufacturing, polymer and aluminum manufacturing. Furthermore, SPIP is widely recognized as the standard microscope image analysis software for research and education at leading universities, and has been cited in more than 1200 scientific publications.
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Primary Standard Capacitors
GenRad 1404 Series
The GenRad 1404 Series standard capacitors are the standard of choice in metrology labs, and still used today by standards bodies around the world. These capacitors have been designed as primary reference standards of capacitance with which working standards can be compared.
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Bottle Cap Torque Meter
HN-B
Shenzhen Chuangxin Instruments Co., Ltd.
HN-B Series Cap Torque Meter is an intelligent metrologic instrument and is designed for detecting and calibrating the torsion of various caps. Installation of clamps is easy, rapid and its max diameter can reach 200mm.You can connect it to PC by USD output and transmit data for analysis and printing.
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CT PT Tester
HTFA-103A / 336
Wuhan Huatian Electric Power Automation Co., Ltd.
Used for automatic testing of protective and metrological CT/PT.
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Metrology Solutions for Semiconductors
Bruker Semiconductor develops, manufactures, markets, and supports metrology solutions for thin films, which are based on novel, rapid, non-contacting and non-destructive X-ray technology. With Bruker’s acquisition of Jordan Valley Semiconductors, a name synonymous with unparalleled worldwide customer service and support, 75% of the world's top 25 semiconductor manufacturers rely on Bruker metrology tools for front-end and back-end applications, including development of their next-generation thin films. Bruker commitment to innovation and technology leadership drives the continued release of new advancements in metrology, and has garnered numerous awards and industry recognition.
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Robotic Inspection Made Easy
i-Robot
The i-Robot technology is suitable for all industrial robots; it provides a production-ready metrology solution that is accurate, reliable and flexible. i-Robot is perfectly suited for all applications requiring flexibility and productivity while providing high metrological accuracy.
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Inspection Systems
EVG's metrology solutions for wafer inspection and measurement are optimized for lithography and all types of bonding applications. Customers can choose between integration of the metrology technology within fully-automated equipment, or stand-alone metrology systems serving multiple process steps. EVG's metrology solutions are optimized to maximize our customers' production yields, featuring:
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Metrology Solutions for Semiconductors
Bruker Semiconductor develops, manufactures, markets, and supports metrology solutions for thin films, which are based on novel, rapid, non-contacting and non-destructive X-ray technology. With Bruker’s acquisition of Jordan Valley Semiconductors, a name synonymous with unparalleled worldwide customer service and support, 75% of the world's top 25 semiconductor manufacturers rely on Bruker metrology tools for front-end and back-end applications, including development of their next-generation thin films. Bruker commitment to innovation and technology leadership drives the continued release of new advancements in metrology, and has garnered numerous awards and industry recognition. In applications ranging from C-S thin films materials characterization to wafer substrate analysis and defect detection, Bruker’s systems provide simulation analysis and fit. HRXRD, XRR, WA-XRD, and XRDI measurement types are fully supported, enabling researchers, production engineers, and process developers unparalleled capabilities. Whether you are a semi and C-S fabricator, R&D center or academy, or an industry materials research facility, Bruker has a specifically designed solution for your metrology needs.
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Optical 3D Measuring Systems & Devices For Your Quality Assurance
As a manufacturer of optical industrial metrology, we offer a broad portfolio of optical 3D measuring systems & devices to support companies in various industries with precise quality assurance in production. Based on Focus Variation technology, our measuring systems not only enable surface roughness measurement, but also the detection of micro-geometries, shapes and structures.
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Scatterometers / Thin film Metrology Systems
Olympian Series
DUV-Vis-IR (Wavelength Range: 190nm – 15,000nm) Scatterometers / Thin Film Metrology Systems: The n&k Olympian, n&k Olympian-450 and n&k Olympian-M are DUV-Vis-IR scatterometers/thin film metrology systems with micro-spot technology, covering the wavelength range from 190nm – 15,000nm. With the inclusion of the infra-red wavelength range, the Olympian Series extends the capabilities of n&k’s DUV-Vis-NIR scatterometer series – the OptiPrime-CD Series.
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Rotary Positioning
Direct Drive Theta
Our Direct Drive Theta (DDT) rotary stage units feature a compact mechanical design that makes them easy to integrate into metrology systems and other machines that need precision positioning.
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kSA ACE
The kSA Atomic Control for Epitaxy (ACE) metrology tool is a highly sensitive instrument that measures the in situ flux rate of atomic species using the principle of atomic absorption spectroscopy.
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CEP Stable Lasers And CEP Phase Stabilization
Carrier envelope phase stabilization (CEP) is an enabling technology for metrology and for the generation of few cycle pulses. As one of the pioneers in the field we have developed products that allow to stabilize the carrier envelope phase of light pulses of few cycle pulse oscillators and amplifiers.
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Surface Profilers
Taylor Hobson offers a world leading range surface form, surface finish and metrology solutions for 3D contour,ideal for the most demanding applications.
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Compound Semi | MEMS | HDD Manufacturing
KLA has a comprehensive portfolio of inspection, metrology, and data analytics systems to support power devices, RF communications, LED, photonics, MEMS, CPV solar and display manufacturing. High brightness LEDs are becoming commonly used in solid-state lighting and automotive applications, and LED device makers are targeting aggressive cost and performance improvements, requiring more emphasis on improved process control and yield. Similarly, leading power device manufacturers are targeting faster development and ramp times, high product yields and lower device costs, and are implementing solutions for characterizing yield-limiting defects and processes. KLA's inspection, metrology and data analytics systems help these manufacturers control their processes and increase yield.
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High Precision Angular Positioning Calibration and Geometry Inspection
LabStandard
Rotary Precision Instruments UK Ltd
Ultra precise rotary tables intended for fine inspection, metrology and test applications.Designed for horizontal and vertical applications with self-locking worm gearing and a high accuracy angular encoder ensures sensitivity and fine positioning for metrology and precision testing.
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First Article Inspection Services
API’s, on-site, first article measurement services provide inspection data on parts and assemblies with direct comparison against CAD models or drawings. Generated 3D measurement data from our portable metrology equipment and 3D scanners offers a comprehensive analysis of the physical part under measurement. Inspection reports can include 3D color maps or generated 3D models for detailed computer analysis.
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Dimensional Metrology
Stand-Alone Metrology Family
Nova’s stand-alone metrology platforms are utilized to characterize critical dimensions such as width, shape and profile with high precision and accuracy and are used in multiple areas of the fab such as photolithography, etch, CMP and deposition in the most advanced technology nodes, across all semiconductor leading customers.
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3D Metrological Software
InnovMetric PolyWorks
Powerful metrological software which can effectively process vast amounts of data from 3D scanners in real time. Due to its modular architecture the software covers a large number of applications: one-point inspection by touch measurement systems, scanned data processing and data comparison to CAD models or complete reverse engineering – CAD model creation.
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Gauges & Calibrators
Ralston Instruments' gauges and calibrators are born from decades of experience working with technicians, project managers and facilities teams responsible for maintaining metrology instruments.
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Precision Connectors
Rosenberger Hochfrequenztechnik GmbH & Co. KG
Connectors form the electronic bridge for active and passive components and devices in a variety of applications. In the laboratory and metrology sector – for example in research and development, testing or quality assurance departments – precision connectors are used due to the detailed requirements for technology and processes.
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Meter Engineering Board
MEB
Perform qualification, disconnect, communication, and advanced functional tests with TESCO’s new Meter Engineering Board. With basic metrology (0.1% accuracy) TESCO’s new MEB can also be used as a demand board or a time-run board, as part of meter certification, or to meet regulatory testing requirements. A new socket design provides automated operation to make loading easier. All new TESCO boards include our new electronically actuated sockets.
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Wavefront Measurement Systems Using the Shack-Hartmann Sensor
Lumetrics has applied the ingenious Shack-Hartmann sensor to a range of wavefront measurement systems ideal for analyzing optics-related products and materials, from contact lenses to intraocular lenses to laser beam analysis, surface measurement, and phase parameters. While Shack-Hartmann technology may be widely adopted in the wavefront metrology industry, Lumetrics has applied the technology in unique ways and added industry-leading hardware and software features to our systems that offer you significant advantages over our competitors.
