Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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Product
Benchtop Metrology Solution
FilmTek 2000 PAR-SE
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Scientific Computing International
Our most advanced benchtop metrology solution, engineered to meet the needs of nearly any advanced thin film measurement application, from R&D to production. Combines spectroscopic ellipsometry and DUV multi-angle polarized reflectometry with a wide spectral range to deliver the highest accuracy, precision, and versatility in the industry. Patented parabolic mirror technology allows for a small spot size down to 50µm, ideal for direct measurement of product wafers and patterned films.
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Product
Metrology & Inspection Systems
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Our optical and e-beam wafer metrology and inspection products quickly and accurately measure pattern quality before and during high-volume chip manufacturing.
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Product
Calibration Baths
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Fluke Calibration temperature baths provide optimal temperature environments for “secondary” or “comparison” temperature calibrations. They offer unsurpassed stability and uniformity, a large working volume, and flexibility for performing thermometer calibration on calibrating a variety of temperature sensors. A world-class temperature controller and 30+ years of experience make these the choice of National Metrology Institutes and calibration laboratories worldwide. Fluke Calibration temperature baths include: compact temperature baths; deep-well temperature baths; standard calibration baths; resistor maintenance baths; ice-point baths; bath / temperature controllers.
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Product
Adapter, 2.4 mm (f) to 3.5 mm (m), DC to 26.5 GHz
11901D
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The Keysight 11901D is a metrology grade, 2.4 mm female to 3.5 mm male adapter with dc to 26.5 GHz operation.
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Product
InnovMetric-Polyworks Software
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PolyWorks is a powerful industrial 3D metrology software solution.
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Product
Laser Interferometers & Calibration Systems
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Keysight Technologies is a world leader in the design and manufacture of laser interferometry systems, advanced electronic measurement systems, high-precision optical components, complex monolithic optics (CMOs), and opto-electronic systems design for the most demanding metrology applications. Keysight systems offer high precision in a wide dynamic range, the ability to simultaneously measure a position with multiple degrees of freedom, and the highest accuracy available in both air and vacuum systems.
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Product
Inspection System
Pixie
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3-D Metrology for automation. Pixie is a standard system for automated optical quality inspection. Pixie can be configured with 2 to 5 servo driven axis movement and the high-speed measurement capabilities make it suitable for inline and stand-alone solutions.
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Product
SlipFinder
YIS and SF Series
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The YIS and SF Series metrology systems are designed for optical detection of wafer defects such as crystaldislocations, slip and other defects. The YIS-300HM (for 300 mm wafers) and YIS-200HM (for 200 mm wafers) utilizeMakyoh optics technology (Magic Mirror) and integrated robotic wafer handler provided by Hologenix.The SF300M and SF300N systems offer a low cost functionally equivalent alternative to the YIS series.
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Product
Analytical Software for Microscopy
SPIP
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SPIP™ or Scanning Probe Image Processor - is an advanced software package for processing and analyzing microscopic images at nano- and microscale. It has been developed as a proprietary software by Image Metrology and is unique in the microscopy and microscale research market. With the high level of usable features, SPIP provides industrial and academic researchers with an advanced toolkit for working with microscope images, incl. extracting data from most microscopy file types, cleaning and enhancing data, analyzing measurements, visualizing and reporting analysis results. The software is used for research and innovation in a variety of industries such as pharmaceutical, cosmetics, semiconductors, hard disk manufacturing, polymer and aluminum manufacturing. Furthermore, SPIP is widely recognized as the standard microscope image analysis software for research and education at leading universities, and has been cited in more than 1200 scientific publications.
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Product
In-Situ Metrology Etch
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In-situ metrology systems are attached to deposition systems on one or several viewports for monitoring the progression of the etch dept during the process in real time. No matter if the required stop depth lies within a layer or at an interface.
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Product
Measurement Systems
MicroMeasure3D
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Sciences et Techniques Industrielles de la Lumière
STIL MicroMeasure3D, PORTICO3D and MAESTRO3D are measurement systems designed to achieve true 3D metrology of each point for the most demanding applications adapted to Industry 4.0 standards.
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Product
Displacement Transducers
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Displacement transducers are suitable for direct, accurate measurement of displacements in automatic control and metrology.
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Product
Metrology Systems
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Metrology is essential to control, optimize and ensure the highest yield in semiconductor manufacturing processes. By implementing feedback loops, both process control and process parameter correction are enabled, which allow compliance to tighter process requirements. EVG's metrology solutions are optimized for lithography and all types of bonding applications, and use non-destructive measurement methods. Customers can choose between integration of the metrology technology within fully automated process equipment, or stand-alone metrology systems serving multiple process steps.
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Product
Scatterometers / Thin Film Metrology Systems
OptiPrime Series
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The n&k OptiPrime series are automated metrology systems used to fully characterize and monitor Thin Film and OCD applications for both current and next generation IC processes.
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Product
Hydrogen Frequency & Time Standard
CH1-1007
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Hydrogen frequency and time standard Ch1-1007 is designed to generate and reproduce precision, highly stable, spectrally pure frequency and time signals. Main areas of application: – in metrology when transferring the sizes of units of frequency and time, including as part of mobile measuring complexes; – in radio astronomy when conducting scientific research; - in radio navigation when working as part of automated measuring systems and complexes.
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Product
Inductance Standard
1482 Series
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The GenRad 1482 Standard Inductors are the standard of choice in metrology labs. Used today by national metrology institutes and primary standards bodies around the world, these inductors have no peer or equivlent.
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Product
Edge Radius Measurement
EDGEINSPECT
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NOVACAMTM EDGEINSPECTTM system is a modular, non-contact 3D metrology system that:Measures, down to the micron, any type of edge: cutting edges, inside or outside edges, edges on round holes, straight edges, etc.
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Product
PHOTO-2000m M-LUX Meter
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Hangzhou Everfine Photo-E-Info Co., LTD
Designed for low illuminance testing above 10-4 lx. The standard CLASS A photometric detector with pre-amplification is adopted, which greatly improves the output signal quality of the detector. At the same time, the industry's advanced level of m-lux detection technology, better stability, suitable for darkroom, photo photocopying room, metering laboratory, physics laboratory, metrology laboratory and other related scientific research, engineering, product inspection and other occasions.
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Product
Xytronic Three-Phase Reference Standard +/- 0.04%, +/- 0.02%, +/- 0.01%
RADIAN RX-30, RX-31 and RX-33
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Radian Research is committed to providing our customers with leading innovative and technologically superior products, while maintaining metrology capability in power and energy measurement that is surpassed by none. Our engineers drew on the expertise and knowledge we acquired for our industry-leading legacy RM (Metronic) and RD (Dytronic) reference standards to develop the RX (Xytronic), the ultimate in power and energy measurement technology perfection.
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Product
High Precision 3D Metrology
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Ensure zero-defect quality in all product deliveries and boost customer satisfaction: ISRA’s precision metrology systems measure all object and surface properties down to the nanometer level while ensuring the shortest cycle times.
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Product
Micro-spot DUV Reflection and Transmission Spectrophotometry
FilmTek 3000 PAR
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Scientific Computing International
Metrology system with a 50µm spot that delivers high-performance transmission and reflection measurement of patterned films deposited on transparent substrates. Ideally suited for measuring the thickness and optical constants of very thin absorbing films.
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Product
Programming
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You are looking for a LabVIEW-solution for a test problem? LabVIEW is an excellent development environment for all areas of metrology. Here we have extensive experience and can help in your test problems. In the LabVIEW programming language, we develop VIs (Virtual Instruments) that can be integrated easily in TestStand. Using hardware-oriented programming languages such as C# and LabVIEW, we develop integrations of control and measurement components.
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Product
Adapter, 2.4 mm (m) to APC-7, DC to 18 GHz
11902A
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The Keysight 11902A is a 2.4 mm male to APC-7, metrology grade adapter with dc to 18 GHz operation.
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Product
Digital Readouts & Metrology Tools
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HEIDENHAIN digital readouts have universal applications. In addition to standard tasks on milling, drilling and boring machines and lathes, they also can be used with machine tools, measuring and testing equipment, and special machines in fact, they can be used with any machine where axis slides are traversed manually.
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Product
kSA ACE
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The kSA Atomic Control for Epitaxy (ACE) metrology tool is a highly sensitive instrument that measures the in situ flux rate of atomic species using the principle of atomic absorption spectroscopy.
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Product
Optical Coordinate Measuring System
MaxSHOT 3D
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Creaform’s MaxSHOT 3D lineup is a game changer for product development, manufacturing, quality control and inspection teams that need the highest measurement accuracy and repeatability as much for large‑scale projects than parts from 2 to 10 m. Imagine achieving accuracy better than 0.015mm/m! Thanks to its sophisticated user guidance technology and easy‑to‑use software, the MaxSHOT 3D is ideal for users of all levels—even non‑metrology experts—so that you gain peace of mind knowing your measurements are always right on the dot and you increase process efficiency. If you consistently work on large‑scale projects, the MaxSHOT 3D is your go-to solution to slash budget-busting measurement mistakes, improve product quality, increase process efficiency—and minimize overall operating costs.
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Product
Full Range Photodiode Array UV-VIS-NIR-SWIRLaboratory Spectroradiometers
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The SR-Series of full range laboratory spectroradiometers is ideal for a wide range of applications, including Solar radiance and irradiance measurements. Solar simulator test and classification. LED, laser, light source metrology. Radiometric calibration transfer. Remote sensing applications.
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Product
Metrology System
Atlas V
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The new Atlas V metrology system is designed to measure several key steps that include buried features, not visible by CD-SEM and other techniques. Through remarkable improvements in the optical systems, mechanical sub-systems and software algorithms, the Atlas V system can precisely measure the very subtle variations for device parameters and reveal weak process corners for engineers to improve their process robustness in the fab.
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Product
Metrology Device
XPLOR 100
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XPLOR 100 is a state of the art, fully automated metrology device designed for measurement and analysis of bubbles and inclusions for optical substrates in the Visible and NIR wave-bands.
